Mgo-tio sintered compact target and method for producing same

A manufacturing method and technology of sintered bodies, which are applied in the manufacture of record carriers, disk-shaped carriers, paint carrier supports, etc., can solve problems such as poor productivity, slow film forming speed, and film quality deterioration, and achieve cost reduction and particle generation. The effect of reducing the amount and increasing the film forming speed

Inactive Publication Date: 2015-05-27
JX NIPPON MINING & METALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are problems in that the RF sputtering is poor in productivity due to its slow film formation rate, and also deteriorates the quality of the film due to easy generation of particles.

Method used

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  • Mgo-tio sintered compact target and method for producing same
  • Mgo-tio sintered compact target and method for producing same
  • Mgo-tio sintered compact target and method for producing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] As raw material powders, MgO powder with an average particle diameter of 1 μm and a purity of 4N (99.99%) and TiO powder with an average particle diameter of 30 μm and a purity of 3N (99.9%) were prepared. Then, these raw material powders were blended so that the composition ratio shown in Table 1 was obtained.

[0059] Then, put the weighed powder together with the grinding medium zirconia balls into a ball mill tank with a capacity of 10 liters under Ar atmosphere, and rotate for more than 20 hours for mixing and grinding, so that the two powders are evenly dispersed.

[0060] Then, the powder taken out of the tank was filled into a graphite mold with a diameter of 180 mm, and shaped and sintered using a hot press device. The conditions of hot pressing are: vacuum atmosphere, holding temperature of 1400 ° C, from the beginning of heating to the end of holding at 250kgf / cm 2 The pressure is pressurized.

[0061] The sintered body thus produced had a relative density ...

Embodiment 2

[0067] As raw material powders, MgO powder with an average particle diameter of 1 μm and a purity of 4N (99.99%) and TiO powder with an average particle diameter of 20 μm and a purity of 3N (99.9%) were prepared. Then, these raw material powders were blended so that the composition ratio shown in Table 1 was obtained.

[0068] Then, put the weighed powder together with the grinding medium zirconia balls into a ball mill tank with a capacity of 10 liters under Ar atmosphere, and rotate for more than 20 hours for mixing and grinding, so that the two powders are evenly dispersed.

[0069] Then, the powder taken out of the tank was filled into a graphite mold with a diameter of 180 mm, and shaped and sintered using a hot press device. The conditions of hot pressing are: vacuum atmosphere, holding temperature 1400°C, from the beginning of heating to the end of holding at 300kgf / cm 2 The pressure is pressurized.

[0070] The sintered body thus produced had a relative density of 98...

Embodiment 3

[0073] As raw material powders, MgO powder with an average particle diameter of 1 μm and a purity of 4N (99.99%) and TiO powder with an average particle diameter of 30 μm and a purity of 3N (99.9%) were prepared. Then, these raw material powders were blended so that the composition ratio shown in Table 1 was obtained.

[0074]Then, put the weighed powder together with the grinding medium zirconia balls into a ball mill tank with a capacity of 10 liters under Ar atmosphere, and rotate for more than 20 hours for mixing and grinding, so that the two powders are evenly dispersed.

[0075] Then, the powder taken out of the tank was filled into a graphite mold with a diameter of 180 mm, and shaped and sintered using a hot press device. The conditions of hot pressing are: vacuum atmosphere, holding temperature of 1400 ° C, from the beginning of heating to the end of holding at 250kgf / cm 2 The pressure is pressurized.

[0076] The sintered body thus produced had a relative density o...

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Abstract

A MgO-TiO sintered compact comprising 25 to 90 mol% of TiO, with the remainder made up by MgO and unavoidable impurities. The present invention addresses the problem of providing: a highly dense target which has a high film deposition speed and can be subjected to direct-current (DC) sputtering by which particles are formed in a reduced amount; and a method for producing the target.

Description

technical field [0001] The present invention relates to a magnesium oxide-based target for forming a magnesium oxide layer for electronic devices such as a magnetic recording medium for a magnetic disk device and a tunneling magnetoresistance (TMR) element, and a manufacturing method thereof, and particularly relates to a conductive and high-density target A sintered magnesium oxide-based target for sputtering and a manufacturing method thereof. Background technique [0002] In recent years, along with miniaturization and high recording density of magnetic disks, research and development of magnetic recording media have been carried out, and various improvements have been made in particular to magnetic layers and underlayers. The recording density of the hard disk is increasing rapidly year by year, and it is believed that the current surface density of 600Gbit / square inch will reach 1Tbit / square inch in the future. When the recording density reaches 1 Tbit / square inch, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/04C04B35/46C23C14/34G11B5/65G11B5/82G11B5/84G11B5/851
CPCC04B35/46G11B5/82G11B5/851G11B5/3909C04B35/053C04B35/645C04B2235/3206C04B2235/3232C04B2235/5436C04B2235/77C04B2235/786C23C14/08C23C14/3414
Inventor 高见英生中村祐一郎荒川笃俊荻野真一
Owner JX NIPPON MINING & METALS CO LTD
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