Method for preparing compounds of iron nano-particles coated with carbon nano tube/graphite
A carbon nanotube, graphite coating technology, applied in nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., to achieve the effect of ensuring repeatability, simple operation process, and short deposition time
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[0021] 1) Using silicon wafers as the substrate, using PECVD, using Co (Fe, Ni) as the catalyst, heating up to 800°C in a hydrogen atmosphere, and the heating rate is 20°C / min. When this temperature is reached, methane gas is introduced to make The ratio of methane to hydrogen is 6 / 80sccm, and the total pressure is controlled at 1200Pa;
[0022] 2) In the PECVD equipment, after completing step 1), turn on the RF power supply, control the RF power at 230W, and the deposition time is 20min;
[0023] 3) After the reaction is over, continue to pass hydrogen to room temperature;
[0024] According to the exemplifying method of the above-mentioned invention, a composite of iron nanoparticles coated with carbon nanotubes / graphite can be prepared, and the material has the following characteristics:
[0025] 1) Scanning (SEM) and transmission electron microscope (TEM) characterization of the sample obtained by the method used in the above invention shows that a large number of sph...
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