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High-hardness TiSiBN nano-composite structure protective coating and preparation method thereof

A protective coating and nano-composite technology, applied in coatings, metal material coating processes, layered products, etc., can solve the problems of difficult industrial production, complex production process, low elastic modulus, etc., and achieve production efficiency High, low equipment requirements, low cost effect

Inactive Publication Date: 2015-07-29
SHANGHAI IKEN PRECISION TOOLS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In the above-mentioned existing nanostructure coatings and their preparation technologies, no coatings with ultra-high hardness exceeding 40 GPa have been seen, and the elastic modulus is also low; in addition, the existing preparation technologies consume a lot of energy during the preparation process , the efficiency is low, and the equipment used also has a series of defects such as high cost and complicated production process, so it is difficult to realize large-scale industrial production

Method used

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Examples

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Effect test

preparation example Construction

[0040] The preparation method of the high-hardness TiSiBN nanocomposite structure protective coating comprises the following preparation steps:

[0041] (1) Substrate cleaning

[0042] Clean the mirror-polished substrate in absolute ethanol and acetone for 5 to 10 minutes with ultrasonic waves, the frequency of which is 15 to 30 kHz;

[0043] Then perform ion cleaning: put the substrate into the sampling chamber, turn on Ar gas after vacuuming, maintain the vacuum degree at 2-4Pa, and use a radio frequency power supply to carry out ion bombardment on the substrate for 30 minutes, with a power of 80-100W;

[0044] (2)TiB 2 Preparation of transition layer

[0045] Send the substrate treated in step (1) to the sputtering chamber for deposition of TiB 2 transition layer, TiB 2 The target material is controlled by a radio frequency cathode, the Ar gas flow rate is 20-50 sccm, and the radio frequency power source is used to deposit 5-8 minutes to obtain TiB with a thickness of 200...

Embodiment 1

[0050] The specific process parameters in the present embodiment step (3) are: target base distance 5cm; Ar gas flow is 50sccm, N 2 The gas flow rate is 10 sccm; the deposition pressure is 0.4Pa; the substrate temperature is 300°C; and the sputtering power is 350W. After testing, the hardness of the obtained protective coating with nanocomposite structure is 40.5GPa; inside the coating is a nanocomposite structure in which TiN nano equiaxed grains are wrapped by the SiBN interface phase. According to the X-ray phase analysis, the coating is surface Center-cubic structure, preferred orientations are (200) and (111), growing in the form of columnar crystals.

Embodiment 2

[0052] The specific process parameters in the present embodiment step (3) are: target base distance 5cm; Ar gas flow is 40sccm, N 2 The gas flow rate is 12 sccm; the deposition pressure is 0.6Pa; the substrate temperature is 200°C; and the sputtering power is 320W. After testing, the obtained nanocomposite structure protective coating has a hardness of 41.7GPa.

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Abstract

The invention relates to a high-hardness TiSiBN nano-composite structure protective coating and a preparation method thereof. The preparation method comprises the following steps: (1) cleaning a substrate and then carrying out ion cleaning; (2) preparing a TiB2 transition layer, namely feeding the substrate processed in the step (1) into a sputtering chamber and depositing a 200-300nm TiB2 transition layer, wherein a TiB2 target is controlled by a radio frequency cathode; (3) preparing a TiSiBN layer, wherein a TiSiB composite target is controlled by the radio frequency cathode, and a 2-5 mu. m TiSiBN nano-composite structure coating is deposited. The coating disclosed by the invention not only has ultrahigh hardness over 40GPa, but also has excellent high-temperature oxidation resistance and corrosion resistance, and can be used as a protective coating for high-speed and dry cutting tools and high-load-bearing equipment in other fields; the preparation method disclosed by the invention has the characteristics of simple process, high deposition speed, low cost, high bonding strength and the like, and has the advantages of high production efficiency, low energy consumption, relatively low requirement on equipment and the like.

Description

technical field [0001] The present invention relates to a new type of hard protective coating, in particular to a protective coating with high hardness TiSiBN nanocomposite structure and a preparation method thereof, which is used as a protective coating for cutting tools, molds and other parts bearing wear resistance, impact and other loads , belongs to the technical field of material surface modification. Background technique [0002] With the development of society and the advancement of science and technology, higher and higher requirements are put forward for the surface properties of materials. While maintaining a certain toughness, the material surface is also required to have high hardness, wear resistance, corrosion resistance and high temperature performance. Coating a certain thickness of coating on the surface of the material is an effective way to improve the surface performance of the material. Its development meets the high technical requirements of the moder...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06B32B9/04
Inventor 樊于麟林峰李伟
Owner SHANGHAI IKEN PRECISION TOOLS
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