Doped cerium oxide catalytic film with preferred orientation, preparation and applications thereof
A technology of preferential orientation and cerium oxide, which is applied in electrochemical generators, ion implantation plating, fuel cells, etc., can solve the problems such as the inability to prepare doped cerium oxide films, achieve improved electrocatalytic oxidation performance, and reduce anode The effect of lowering the polarization resistance and reducing the cathode polarization resistance
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Embodiment 1
[0020] In nickel oxide with Y 2 o 3 Stable ZrO 2 Composite anode / Y 2 o 3 Stable ZrO 2 Dense Zr sputtered with preferred orientation of (100) on membrane electrode (NiO-YSZ / YSZ) 2 o 3 Doped CeO 2 (Zr 0.2 Ce 0.8 o 1.9 ) thin film, ultrasonically cleaned the anode-supported membrane electrode with acetone, ethanol, and distilled water in sequence and dried it, then put it into the vacuum chamber of the magnetron sputtering apparatus, adjust the target base distance to about 6cm, and use cerium / gadolinium alloy The material is the target, the purity of the target is above 99.99%, the molar ratio of cerium / zirconium is 8 / 2, and the vacuum is 8*10 -4 Pa, then heat the substrate table, the temperature rises to 300°C, the argon flow rate is 10.0 sccm, the oxygen flow rate is 1.2 sccm, and the sputtering power is 9W / cm 2 , the sputtering pressure is 0.5Pa, the rotation speed of the substrate table is set at 5 cycles / min, and the thickness is about 500nm. 0.2 Ce 0.8 o 1.9 ...
Embodiment 2
[0022] In nickel oxide and Gd 2 o 3 Doped CeO 2 Composite anode / Gd 2 o 3 Doped CeO 2 Dense SnO with preferred orientation of (100) sputtered crystal plane on membrane electrode (NiO-GDC / GDC) 2 Doped CeO 2 (Sn 0.1 Ce 0.9 o 2 ) thin film, adjust the target base distance to about 6cm, use cerium / gadolinium alloy material as the target material, the target material purity is above 99.99%, the cerium / tin molar ratio is 9 / 1, and the vacuum is 8*10 -4 Pa, then heat the substrate table, the temperature rises to 400°C, the flow rate of argon gas is 10.0 sccm, the flow rate of oxygen gas is 1.2 sccm, and the sputtering power is 9W / cm 2 , the sputtering pressure is 0.5Pa, the rotation speed of the substrate table is set at 5 cycles / min, and the thickness is about 200nm. 0.1 Ce 0.9 o 2 After the sputtering of the film, silver paste is coated on it, and the battery performance test is carried out on a four-terminal battery test device. Air is used as the cathode gas, and wet hy...
Embodiment 3
[0024] in la 0.6 Sr 0.4 co 0.2 Fe 0.8 o 2-x (0≤x≤0.3) / Gd 0.1 Ce 0.9 o 1.95 Gd of cathode-supported membrane electrode 0.1 Ce 0.9 o 1.95 Pr with (111) preferred orientation sputtered on electrolyte surface 0.1 Ce 0.9 o 1.95 Anode film, where Pr 0.1 Ce 0.9 o 1.95 The sputtering of the thin film was carried out at a temperature of 200oC with an Ar flow rate of 20.0ml min-1 ,O 2 The flow rate is 2.0ml min -1 , The base distance of the target is about 6cm, the target is made of cerium / praseodymium (9 / 1 molar ratio) alloy material, the purity of the target is above 99.99%, and the vacuum is pumped to 8*10 -4 Pa, sputtering power is 12W / cm 2 , the sputtering pressure is 0.5Pa, the rotation speed of the substrate table is set at 5 cycles / min, and the thickness is about 200nm. 0.1 Ce 0.9 o 1.95 After the sputtering of the thin film, silver paste is coated on it, and the battery performance test is carried out on a four-terminal battery test device, with air as the c...
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