Preparation method of light-absorbing layer of cigs-based thin-film solar cell
A technology for solar cells and light-absorbing layers, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as uneven composition of light-absorbing layers, achieve the effect of reducing the number of surface defects and improving the yield
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Embodiment 1
[0049] A molybdenum electrode layer is deposited on the soda lime glass substrate, then a copper-gallium alloy film is deposited on the molybdenum electrode layer, and an indium layer is deposited on the copper-gallium alloy film, and then the substrate is sent to the heating furnace , use a vacuum pump to remove the gas in the heating furnace to maintain the pressure in the heating furnace at 10 -5 Torr;
[0050] Raise the temperature in the heating furnace from room temperature to 150°C and maintain it at 150°C for 60min;
[0051] After that, the gas containing hydrogen selenide was passed into the heating furnace, while maintaining the pressure in the furnace at 600 Torr, and the temperature in the heating furnace was increased from 150 ° C to 350 ° C, and maintained at 350 ° C for 120 min;
[0052] After that, the residual gas containing selenium in the heating furnace was removed, and then nitrogen gas was introduced to maintain the pressure in the furnace at 600 Torr, a...
Embodiment 2
[0057] A molybdenum electrode layer is deposited on the soda lime glass substrate, then a copper-gallium alloy film is deposited on the molybdenum electrode layer, and an indium layer is deposited on the copper-gallium alloy film, and then the substrate is sent to the heating furnace , use a vacuum pump to remove the gas in the heating furnace to maintain the pressure in the heating furnace at 10 -5 Torr;
[0058] Raise the temperature in the heating furnace from room temperature to 250°C and maintain it at 250°C for 30s;
[0059] After that, the gas containing hydrogen selenide was passed into the heating furnace, while maintaining the pressure in the furnace at 600 Torr, and the temperature in the heating furnace was raised from 250 °C to 450 °C, and maintained at 450 °C for 5min;
[0060] After that, the residual gas containing selenium substances in the heating furnace is removed, and then nitrogen gas is introduced to maintain the pressure in the furnace at 600 Torr, and...
Embodiment 3
[0065] A molybdenum electrode layer is deposited on the soda lime glass substrate, then a copper-gallium alloy film is deposited on the molybdenum electrode layer, and an indium layer is deposited on the copper-gallium alloy film, and then the substrate is sent to the heating furnace , use a vacuum pump to remove the gas in the heating furnace to maintain the pressure in the heating furnace at 10 -5 Torr;
[0066] Raise the temperature in the heating furnace from room temperature to 160°C, and maintain it at 160°C for 30 minutes;
[0067] After that, the gas containing hydrogen selenide was passed into the heating furnace, while maintaining the pressure in the furnace at 400 Torr, and the temperature in the heating furnace was increased from 160 ° C to 380 ° C, and maintained at 380 ° C for 45min;
[0068] After that, the residual gas containing selenium in the heating furnace was removed, and then nitrogen gas was introduced to maintain the pressure in the furnace at 400 Tor...
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