Electronic grade hydrogen chloride purification method

A purification method and hydrogen chloride technology, applied in chlorine/hydrogen chloride purification, chlorine/hydrogen chloride, chemical instruments and methods, etc., can solve problems such as high production cost, high equipment requirements, corrosion, etc., and achieve low production cost, simple operation, and reduced The effect of production costs

Active Publication Date: 2016-04-20
SHANGHAI ZHENGFAN TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, some researchers have successfully synthesized electronic-grade hydrogen chloride in the research and preparation process. At the same time, it has been found from these synthesis methods that the process of preparing hydrogen chloride by analytical method and hydrochloric acid desorption method is simple and can be produced on a large scale, b...

Method used

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  • Electronic grade hydrogen chloride purification method

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Effect test

Embodiment 1

[0022] Such as figure 1 As shown, the specific steps of the purification method of the electronic grade hydrogen chloride of the present embodiment are:

[0023] The first step: introducing industrial-grade liquid hydrogen chloride with a purity of 99% to the middle position of the first rectification tower 2 for rectification, the first rectification tower 2 is a packed tower, and the fillers used are Hastelloy Raschig annular packing made of alloy material, the number of theoretical plates is 24, the rectification pressure is 10bar, the temperature at the top of the column is -20°C, the temperature at the bottom of the column is 10°C, the top of the first rectification column is connected to the first condenser 3. The bottom of the tower is connected to the first reboiler 4, and the first reboiler 4 is heated by an electric heating blanket. In the distillation tower 2, the uncondensed waste gas is discharged into the waste gas treatment system to remove light components suc...

Embodiment 2

[0027] Such as figure 1 As shown, the specific steps of the purification method of the electronic grade hydrogen chloride of the present embodiment are:

[0028] The first step: introducing industrial-grade liquid hydrogen chloride with a purity of 99% to the middle position of the first rectification tower 2 for rectification, the first rectification tower 2 is a packed tower, and the fillers used are Hastelloy The Pall annular packing made of alloy material has a theoretical plate number of 20, a rectification pressure of 12 bar, a tower top temperature of -25°C, and a tower bottom temperature of 0°C. The top of the first rectification column is connected to the first condenser 3. The bottom of the tower is connected to the first reboiler 4. The first reboiler 4 is heated by heat transfer oil. The hydrogen chloride gas generated by the heating of the first reboiler 4 is condensed by the first condenser 3 and then fully refluxed to the first rectification In tower 2, the unc...

Embodiment 3

[0032] Such as figure 1 As shown, the specific steps of the purification method of the electronic grade hydrogen chloride of the present embodiment are:

[0033] The first step: introducing industrial-grade liquid hydrogen chloride with a purity of 99% to the middle position of the first rectification tower 2 for rectification, the first rectification tower 2 is a packed tower, and the fillers used are Hastelloy The stepped annular packing made of alloy material has a theoretical plate number of 12, a rectification pressure of 15 bar, a tower top temperature of -30°C, and a tower bottom temperature of -10°C. The top of the first rectification column is connected to the first condenser 3. The bottom of the tower is connected to the first reboiler 4, and the first reboiler 4 is heated by an electric heating blanket. In the distillation tower 2, the uncondensed waste gas is discharged into the waste gas treatment system to remove light components such as nitrogen, oxygen, hydrog...

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Abstract

The invention provides an electronic grade hydrogen chloride purification method. The method is characterized by comprising the following steps: introducing industrial liquid hydrogen chloride with purity of 99% to the middle position of a first rectifying tower to be rectified so as to remove light components; introducing a liquid coming out from the bottom of a reboiler of the first rectifying tower to the middle position of a second rectifying tower by a pump to be rectified, condensing hydrogen chloride generated through heating by a second reboiler with a second condenser, controlling the reflux ratio, enabling part of hydrogen chloride to flow back to the second rectifying tower and transferring the other part of hydrogen chloride to middle storage tanks to be stored and pumping out residual liquid from the bottom of the second reboiler to a waste liquid storage tank so as to remove heavy components; and obtaining high-purity hydrogen chloride with purity above 99.9999% through adsorption and purification of at least an adsorption tower with a molecular sieve inside. The method has the effect of avoiding introduction of other impurity media, is simple to operate and is low in production cost.

Description

technical field [0001] The invention relates to a method for purifying electronic-grade hydrogen chloride, which belongs to the field of production and purification of electronic special gases. Background technique [0002] Electronic-grade hydrogen chloride is mainly used for high-temperature vapor phase etching of silicon and gallium arsenide before epitaxial growth to remove sodium ions. In addition, high-purity hydrogen chloride is also used for chemical treatment of metal surfaces, mixed gas for lasers, film production and carbon fiber surface treatment. Moreover, high-purity hydrogen chloride is used in the pharmaceutical, chemical, and semiconductor industries, so the demand is increasing. Most of my country's electronic-grade hydrogen chloride products are imported from the United States, Japan and other countries, which are expensive. Therefore, we need to further study and improve the synthesis process of electronic grade hydrogen chloride, which will bring certai...

Claims

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Application Information

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IPC IPC(8): C01B7/07
CPCC01B7/0712
Inventor 汤剑波李东升
Owner SHANGHAI ZHENGFAN TECH
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