Chalcogenide glass and preparation method thereof

A technology of chalcogenide glass and substrate, applied in the coating and other directions, can solve the problem of easy cracking of diamond-like carbon films, and achieve the effects of excellent infrared optical properties, enhanced environmental tolerance, and easy cracking or peeling.

Active Publication Date: 2016-07-27
CHINA BUILDING MATERIALS ACAD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, an embodiment of the present invention provides a chalcogenide glass and a preparation method thereof, the main purpose of which is to solve the problem that the diamond-like film on the surface of the chalcogenide glass is easily broken

Method used

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  • Chalcogenide glass and preparation method thereof

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Embodiment 1

[0024] Prepare and clean the chalcogenide glass matrix Ge of the international general designation IG5 that meets the following performance requirements 28 Sb 12 Se 60 : The above-mentioned chalcogenide glass substrate 1 is in the shape of a flat sheet, with a size of 30×30×4 mm, and a transmission range of 0.8 μm-15 μm. Transmittance ≥ 60%, the density of the above-mentioned chalcogenide glass matrix is ​​4.67g·cm -3 , Vickers hardness 221±5gf / mm 2 , glass transition temperature 285±5℃;

[0025] The above-mentioned chalcogenide glass matrix Ge 28 Sb 12 Se 60 Wipe it clean, place the chalcogenide glass substrate that meets the purification technical requirements on the substrate holder of the magnetron sputtering equipment, install the high-purity germanium target, and pump the vacuum chamber pressure to 8.5×10 -4 Pa, fill the vacuum chamber with high-purity argon to 5×10 -1 Pa; heat the above-mentioned chalcogenide glass substrate to 80°C and keep it warm for 30min; t...

Embodiment 2

[0028] Prepare and clean the original matrix of chalcogenide glass Ge 12 As 33 Se 55 : The original matrix of the above-mentioned chalcogenide glass is a planar sheet, and its transmission range is 0.8 μm-15 μm when the thickness is 4 mm. Rate≥50%, Vickers hardness 217±5gf / mm 2 ;

[0029] The above-mentioned chalcogenide glass original matrix Ge 12 As 33 Se 55 Processed into A spherical lens with a thickness of 1.0 mm and an outer diameter of 37.5 mm, using the above-mentioned spherical lens as a chalcogenide glass substrate 1; the smoothness of the above-mentioned chalcogenide glass substrate 1 is P=Ⅲ~Ⅴ, aperture N=3, △N=0.5, parallel Degree = 3′~5′; wipe the above-mentioned chalcogenide glass substrate clean, and after the Kazakh gas method inspection meets the purification technical requirements, put the above-mentioned chalcogenide glass substrate that meets the purification requirements into the magnetron sputtering equipment, and vacuumize to 8.5× 10 -4 Pa, fil...

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Abstract

The invention discloses chalcogenide glass and a preparation method thereof and relates to the field of glass deep processing.The technical problem that a diamond-like carbon film on the surface of chalcogenide glass is prone to rupture is solved.The chalcogenide glass comprises a chalcogenide glass substrate and a coating film layer deposited on the surface of the chalcogenide glass substrate.The coating film layer comprises a germanium carbide film layer and a diamond-like carbon film layer deposited on the surface of the germanium carbide film layer in sequence from the chalcogenide glass substrate.The chalcogenide glass has excellent optical properties and good surface strength.By intruding the germanium carbide transition layer between the chalcogenide glass substrate and the diamond-like carbon film, the adhesive force between the chalcogenide glass substrate and the diamond-like carbon film is increased, the problem that the diamond-like carbon film on the surface of the chalcogenide glass is prone to rupture is avoided, and the environmental tolerance of the chalcogenide glass is enhanced.

Description

technical field [0001] The invention relates to the field of glass, in particular to a chalcogenide glass and a preparation method thereof. Background technique [0002] Chalcogenide glass is a special glass material with excellent infrared transmission properties. In recent years, among many infrared optical materials, long-wave infrared chalcogenide glasses have attracted extensive attention due to their outstanding performance in optics. Chalcogenide glass has the advantages of low thermal difference coefficient, wide transmission range, high transmittance, good optical uniformity, stable chemical properties and strong acid resistance, and its refractive index dispersion characteristics in the mid- and far-infrared bands are comparable to those of zinc selenide The crystal material is equivalent, and the temperature characteristic is much smaller than that of single crystal germanium. It can effectively reduce or even eliminate the chromatic aberration and thermal differ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/34
CPCC03C17/3441C03C2217/282C03C2218/153C03C2218/156
Inventor 赵华金扬利邱阳祖成奎伏开虎刘永华
Owner CHINA BUILDING MATERIALS ACAD
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