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A kind of two-dimensional atomic layer thickness zno single crystal nanosheet and preparation method thereof

A single crystal nanometer and atomic layer technology, applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of not being free and convenient to peel off, and achieve the effect of ultra-thin thickness, simple operation and large area

Active Publication Date: 2018-06-19
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As far as we know, there is no report on the preparation of a single atomic layer ZnO single wafer in a large area. It is rare to have a few atomic layers thick, and it is not free and easy to peel off. However, there have been many simulation calculations for ultra-thin ZnO. , pointing out that ZnO with atomic layer thickness can be used in magnetism (Wang Y, DingY, Ni J, et al. Electronic structures of fully fluorinated and semifluorinated zinc oxide sheets [J]. Applied Physics Letters, 2010,96(21):213117), mechanics (Kaewmaraya T, De Sarkar A, Sa B, et al.Strain-induced tunability of optical and photocatalytic properties of ZnO mono-layer nanosheet[J].Computational Materials Science,2014,91:38-42), electricity (Kou L,Li C, Zhang Z, et al.Tuningmagnetism in zigzag ZnO nanoribbons by transverse electric fields[J].ACSnano,2010,4(4):2124-2128) have many unique characteristics

Method used

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  • A kind of two-dimensional atomic layer thickness zno single crystal nanosheet and preparation method thereof
  • A kind of two-dimensional atomic layer thickness zno single crystal nanosheet and preparation method thereof
  • A kind of two-dimensional atomic layer thickness zno single crystal nanosheet and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] 1. Weigh 1.5g of zinc powder (purity is 99.9%) and put it into a ceramic boat, then place it in the heating zone of the tube furnace;

[0037] 2. Place the substrate molybdenum mesh directly above the zinc powder;

[0038] 3. Turn on the mechanical pump, and when the pressure in the furnace drops to 0.1 Pa, pass 50 sccm of compressed air into the tube furnace, and control the pressure at 400 Pa;

[0039] 4. Raise the heating zone of the tube furnace to 650°C, the heating rate is 20°C / min, and the reaction time is 2 hours;

[0040] 5. After the reaction is over, after the tube furnace is naturally cooled to room temperature, the sample is taken out, and a large area of ​​ZnO nanosheets with an atomic layer thickness grows on the substrate.

[0041] figure 1 (a) shows the low magnification scanning electron microscope (SEM) image of the atomic layer thickness ZnO single crystal nano-sheet of embodiment 1, as can be seen from this figure, the nano-sheet grows uniformly i...

Embodiment 2

[0048] 1. Weigh 1.2g of zinc powder (purity is 99.9%) and put it into a ceramic boat, then place it in the heating zone of the tube furnace;

[0049] 2. Place the substrate silicon wafer directly above the zinc powder;

[0050] 3. Turn on the mechanical pump, and when the pressure in the furnace drops to 2Pa, pass 30sccm of compressed air into the tube furnace, and control the pressure at 300pa;

[0051] 4. Raise the heating zone of the tube furnace to 550°C, the heating rate is 15°C / min, and the reaction time is 1.5 hours;

[0052] 5. After the reaction is over, after the tube furnace is naturally cooled to room temperature, the sample is taken out, and a large area of ​​ZnO nanosheets with an atomic layer thickness grows on the substrate.

Embodiment 3

[0054] 1. Weigh 1g of zinc powder (99.9% purity) into a ceramic boat, and then place it in the heating zone of the tube furnace;

[0055] 2. The substrate sapphire sheet is placed directly above the zinc powder; the present invention adopts nickel mesh, silicon sheet, ceramic sheet or quartz sheet substrate to achieve the same effect.

[0056] 3. Turn on the mechanical pump, and when the pressure in the furnace drops to 8Pa, pass 60 sccm of compressed air into the tube furnace, and control the pressure at 800Pa;

[0057] 4. Raise the heating zone of the tube furnace to 800°C, the heating rate is 25°C / min, and the reaction time is 1.5 hours;

[0058] 5. After the reaction is over, after the tube furnace is naturally cooled to room temperature, the sample is taken out, and a large area of ​​ZnO nanosheets with an atomic layer thickness grows on the substrate.

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Abstract

The invention discloses a two-dimensional atomic layer thickness ZnO single crystal nanosheet. The atomic layer thickness ZnO nanosheet is prepared by thermal evaporation. Compared with other ZnO nanosheets, the two-dimensional atomic layer thickness of the present invention is ZnO single crystal nanosheets are thinner and more crystalline, making them easier to peel off. The invention also discloses a preparation method of two-dimensional atomic layer thickness ZnO single crystal nanosheets, the method comprising the following steps: (1) putting zinc powder and substrate into a tube furnace; (2) turning on the mechanical pump, Vacuum the furnace and fill it with compressed air; (3) set the temperature rise program, and cool down naturally after the reaction; (4) take out the sample, and grow ZnO nanosheets with an atomic layer thickness on the substrate. The method has simple preparation steps, less time consumption and high repeatability.

Description

technical field [0001] The invention relates to the technical field of semiconductor materials. More specifically, it relates to a two-dimensional atomic layer thickness ZnO single crystal nanosheet and a preparation method thereof. Background technique [0002] Graphene is a two-dimensional honeycomb nanomaterial composed of a single layer of carbon atoms. Due to its unique two-dimensional structure, graphene has amazing electrical and mechanical properties. At present, graphene has been widely used in high-speed electronic devices, energy manufacturing and storage devices. With the deepening of graphene research, graphene-like two-dimensional layered materials have also begun to enter people's field of vision, such as two-dimensional metal chalcogenides (MoS 2 、MoSe 2 、WS 2 、WSe 2 ), h-BN, etc. These layered materials, like graphene, are connected by van der Waals force between layers and are easily interrupted, so a unique single-layer structure can be obtained. [...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/64C30B29/16C30B25/00
Inventor 孟祥敏王磊黄兴夏静黄奔朱丹丹
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI