Application of Coated Glass Slides in Super-resolution Microscopy
A microscopic technology, a technology of coated glass slides, applied in the direction of optical components, instruments, optics, etc., can solve the problems of small field of view, technical difficulty, and difficulty in realizing live cell imaging, etc.
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Embodiment 1
[0037] Such as figure 1 The shown schematic diagram of micro-nano structure ZJU observed on a thin-film slide, including a silicon-based substrate 11, a 200nm-thick Al2O3 optical film 12 plated on the silicon-based substrate, and a micro-nano structure (ZJU) 14 with a period of about 170nm , and an annular micro-nano light source 13 surrounding the micro-nano structure. Among them, the silicon-based substrate adopts a silicon-based substrate with a silicon oxide layer thickness of 280nm. After cleaning the substrate, a 200nm aluminum oxide optical film is plated on the silicon-based substrate by thermal evaporation. Afterwards, micro-nano structures with a depth of about 100nm and a period of about 170nm were prepared by etching on the aluminum oxide film using focused ion beam micro-nano processing technology. In the experiment, the micro-nano light source adopts the semiconductor nanowire lighting method, and through the micro-nano operation, the semiconductor nanowire is c...
Embodiment 2
[0039] Such as figure 2 The shown schematic diagram of observing the stepped micro-nano structure on a thin-film glass slide adopts the same substrate and optical film parameters as in Embodiment 1, including a silicon-based substrate 21 and an aluminum oxide optical film 22 . The stepped micro-nano structure 24 was etched on aluminum oxide by focused ion beam micro-nano processing technology. The inner period of a single double-channel structure is about 170nm, and the distance between the double-channel structures is about 6um. The micro-nano light source Semiconductor nanowires 23 parallel to the microstructure are used. The SEM images of the etched microstructure are shown in Figure 8(a) and Figure 8(b), from the experimental effect diagram Figure 5 , it can be seen that the glass slide structure can achieve a field of view observation range of more than 30um on one side.
Embodiment 3
[0041] Such as Figure three The schematic diagram of the dual-channel structure observed in the manner of multi-layer coating is shown, including a silicon-based substrate 31, an optical film with a lower refractive index (such as MgF 2 , YbF 3 、LaF 3 , SrF 3 , NdF 3 etc.) 32, optical films with higher refractive index (such as Al 2 o 3 、TiO 2 、 Ta 2 o 5 and ZrO 2 etc.) 33, and then use focused ion beam micro-nano processing technology to prepare micro-nano structures on high refractive index films, such as double-channel microstructures 35, or other structures. Micro-nano samples can also be placed on high refractive index films. Afterwards, the micro-nano optical fiber 34 prepared by tapering is placed on a high-refractive-index film at a certain distance from the micro-nano structure or the sample. The external light is coupled into the high refractive index film by micro-nano fiber, and the micro-nano structure or sample is optically imaged by CCD.
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