Gradient MCrAlX coating single-target electric arc ion plating one-step preparation method

A technology of arc ion plating and arc ion, which is applied in the field of coating, can solve the problems of poor controllability, low efficiency, cumbersome preparation process of gradient MCrAlX coating, etc., and achieve low cost, compact structure, process stability and high preparation efficiency Effect

Inactive Publication Date: 2017-01-11
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problems of cumbersome preparation process, low efficiency and poor controllability of the current gradient MCrAlX coating, and provide a one-step preparation method of gradient MCrAlX coating single-target arc ion plating

Method used

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  • Gradient MCrAlX coating single-target electric arc ion plating one-step preparation method
  • Gradient MCrAlX coating single-target electric arc ion plating one-step preparation method
  • Gradient MCrAlX coating single-target electric arc ion plating one-step preparation method

Examples

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Embodiment 1

[0020] This embodiment illustrates the preparation method of a double-layer gradient NiCrAlY coating with a chromium-rich inner layer and a low chromium and high aluminum layer. First, NiCrAlY, Ni-27Cr-11Al-0.5Y, mass percent wt%, the target is installed in the cathode water-cooled target sleeve, the substrate test piece is hung in front of the target, the vacuum chamber door is closed, and the air is pumped; the vacuum degree of the coating chamber reaches 5 ×10 -3 When Pa or higher, the cathodic arc is ignited; first, a pulsed high negative bias is applied to the substrate for coating, with an amplitude of 400-800V and a duty cycle of 10%-80%. When the bias voltage amplitude is 400-600V, the duty cycle should be as large as 30%-80%, and when the bias voltage amplitude is 600-800V, the duty cycle should be as small as 10%-30%. The selection of the bias voltage amplitude is based on the enrichment degree of chromium in the desired deposited coating. The higher the bias voltag...

Embodiment 2

[0022] This example illustrates the preparation method of a double-layer gradient NiCrAlY coating with low chromium on the surface and high aluminum on the inner layer rich in chromium. First, NiCrAlY, Ni-27Cr-11Al-0.5Y, mass percent wt%, the target is installed in the cathode water-cooled target sleeve, the substrate test piece is hung in front of the target, the vacuum chamber door is closed, and the air is pumped; the vacuum degree of the coating chamber reaches 5 ×10 -3 When Pa or higher, the cathodic arc is ignited; in this example, the pulse bias voltage of the bottom layer is -450V, and the pulse bias voltage of the surface layer is -50V. The arc current is 200A, the pulse negative bias frequency is 40kHz, and the duty cycle is 40%. The coating time depends on the thickness of the required coating. In this example, the arc source is turned off after 2 hours for each layer of coating. Thus, a double-layer gradient NiCrAlY coating with low chromium on the surface and hi...

Embodiment 3

[0024] This embodiment illustrates the preparation method of the gradient NiCrAlY coating whose chromium content gradually decreases and the aluminum content gradually increases from the surface to the interior. Also at 5×10 -3 When Pa or higher, the cathodic arc is ignited; the substrate is coated with a pulsed negative bias voltage whose amplitude increases continuously or stepwise with time. The deposition is carried out in the form of pressure amplitude. The current is the same as the previous example. The pulse negative bias voltage applied to the substrate has a frequency of 20 kHz and a duty cycle of 40%. Thus, a gradient NiCrAlY coating with gradually decreasing chromium content and increasing aluminum content from the surface to the interior is obtained. The scanning electron microscope photos and energy spectrum composition analysis of the coating cross section are as follows image 3 shown. Since the aluminum content of the target is relatively low, the gradient...

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Abstract

The invention relates to a gradient MCrAlX coating single-target electric arc ion plating one-step preparation method, and belongs to the technical field of coatings, wherein the method can be used for preparing the adhesion layer and the like of anti-high temperature oxidation and hot corrosion coatings, and thermal barrier coatings, MCrAlX:M comprises, but is not limited to, Fe, Co, Ni, Ti, Pt, Zr, W, Nb, B or a combination thereof, X is a rare earth element and comprises, but is not limited to, Y, La, Hf, Ce, Gd, Dy or a combination thereof, and by using the two sputtering phenomenon and by real-timely adjusting the bias voltage during a film plating process, the gradient MCrAlX coating can be obtained from the single MCrAlX target in one step without other processes, wherein the aluminum and the chrome component present the gradient change from the coating surface to the internal. According to the present invention, the high ionization rate of the electric arc ion plating and the coating anti-sputtering under the high bias voltage are utilized, such that the gradient MCrAlX coating can be obtained from the single target, the prepared coating has the compact structure, the process stability and the preparation efficiency are high and are much better than other multiple process combined gradient coating preparation methods, the cost is low, and the method is suitable for industrial application.

Description

technical field [0001] The invention relates to coating technology, and in particular provides a one-step preparation method for gradient MCrAlX coating single-target arc ion plating. Background technique [0002] Gradient coating, that is, a type of coating whose chemical composition changes gradually from the coating surface to the interior, has excellent resistance to mechanical and corrosion damage that homogeneous coatings do not possess. As a typical high-temperature protective coating, the gradient design of MCrAlX (M is Ni, Co and other matrix metal elements, X is rare earth and other oxophilic elements) is also called smart coating [see literature: J.R.Nicholls, N.J.Simms, W.Y.Chan,H.E.Evans,Smart overlaycoatings-concept and practice,Surface and Coatings Technology,2002,149,236-244], can not only form chromium-rich oxide film in hot corrosion environment to resist high temperature corrosion, but also form in oxidizing atmosphere The aluminum oxide film slows down t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32
Inventor 沈明礼赵盼盼朱圣龙王世臣王福会
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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