A kind of recovery method of silicon carbide micropowder
A technology of silicon carbide micropowder and recycling method, applied in the direction of silicon carbide, carbide, etc., can solve the problems of reducing the qualified rate of silicon wafers, high sewage treatment costs, reducing cutting efficiency, etc., to reduce the difficulty of sewage treatment, high production efficiency, Easy-to-use effects
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Embodiment 1
[0029] The recovery method of described silicon carbide micropowder, comprises the following steps:
[0030] (1) Calcination: calcining the recovered material at 380°C to obtain a calcined raw material with a silicon carbide content of 90.0%, a COD of 500mg / L, and a fine powder with a particle size of 0-2μm accounting for 60%;
[0031] (2) Swirl flow: mix the calcined raw materials with water according to the mass ratio of 1:1, and enter the swirl flow in the cyclone to obtain a swirl with a silicon carbide content of 92.1% and fine powder with a particle size of 0-2 μm accounting for 40%. After flow slurry;
[0032] (3) Pickling: After fully stirring the swirled slurry, pour it into an acid bubble barrel, soak it in sulfuric acid with a mass concentration of 98%, and then use a vacuum filter to deacidify it to obtain a pH value of 7 and a silicon carbide content of 94.0%. The slurry after deacidification, wherein the input amount of sulfuric acid accounts for 1.5% of the tot...
Embodiment 2
[0038] The recovery method of described silicon carbide micropowder, comprises the following steps:
[0039] (1) Calcination: calcining the recovered material at 480°C to obtain a silicon carbide content of 92.5%, a COD of 400 mg / L, and fine powders with a particle size of 0-2 μm accounting for 50% of the calcined raw materials;
[0040] (2) Swirl flow: mix the calcined raw materials with water according to the mass ratio of 1:10, and enter the swirl flow in the cyclone to obtain a swirl with a silicon carbide content of 95.5% and fine powder with a particle size of 0-2 μm accounting for 30%. After flow slurry;
[0041] (3) Pickling: After fully stirring the swirled slurry, pour it into an acid bubble barrel, soak it in sulfuric acid with a mass concentration of 99%, and use a vacuum filter to deacidify it to obtain a pH value of 5 and a silicon carbide content of 96.3%. The deacidified slurry, wherein the sulfuric acid input accounts for 2% of the total mass of the slurry af...
Embodiment 3
[0047] The recovery method of described silicon carbide micropowder, comprises the following steps:
[0048] (1) Calcination: calcining the recovered material at 400°C to obtain a silicon carbide content of 91%, a COD of 350 mg / L, and fine powders with a particle size of 0-2 μm accounting for 55% of the calcined raw materials;
[0049] (2) Swirl flow: mix the calcined raw materials with water according to the mass ratio of 1:6, and enter the swirl flow in the cyclone to obtain a swirl with a silicon carbide content of 93.7% and a fine powder with a particle size of 0-2 μm accounting for 34%. After flow slurry;
[0050] (3) Pickling: After fully stirring the swirled slurry, pour it into an acid bubble barrel, add sulfuric acid with a mass concentration of 98% for soaking, and use a vacuum filter to deacidify it to obtain a pH value of 6 and a silicon carbide content of 96.2%. The slurry after deacidification, wherein the input amount of sulfuric acid accounts for 1.8% of the t...
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