Method for preparing spherical nanometer silicon by virtue of thermal plasma method

Abstract

The invention relates to a method for preparing spherical nanometer silicon by virtue of a thermal plasma method, and belongs to the technical fields of silicon metallurgy and material preparation. The method comprises the following steps: introducing industrial gas or mixed gas into a plasma generator, performing arc striking to obtain a thermal plasma, causing micron-sized silicon-containing powder to enter a high-temperature thermal plasma region to obtain gaseous silicon atoms and other gaseous particles through carrier gas, and quickly chilling the gaseous silicon atoms and the other gaseous particles to obtain spherical nanometer silicon with nanometer particle sizes of 1 to 100 nm, wherein the micron-sized silicon-containing powder is micron-sized silicon powder, silicon oxide powder, silicon nitride powder or silicon carbide powder. According to the method, the silicon-containing powder such as the silicon powder, the silicon oxide powder, the silicon nitride powder and the silicon carbide powder is adopted as a raw material, and compared with the prior art that silane with relatively high cost is adopted as a main silicon-containing raw material, the method has the advantages of lower raw material cost, higher process safety and the like.

Description

technical field [0001] The invention relates to a method for preparing spherical nano-silicon by using a thermal plasma method, and belongs to the technical field of silicon metallurgy and material preparation. Background technique [0002] Since the birth of nanotechnology in the late 1980s, people have understood the world from a new level through in-depth research on nanomaterials. Nanoparticles are obviously different from ordinary particles in terms of electricity, magnetism, heat, light, sensitive properties and surface stability, so they have broader application fields. Among them, nano-silicon can be used in lithium battery anode materials, third-generation solar cell materials, semiconductor microelectronic packaging materials, and catalytic water splitting to produce hydrogen. [0003] The commonly used preparation methods of nanoparticles include milling method, solid phase method, liquid phase method and gas phase method. The milling method grinds large particl...

AI Technical Summary

Problems solved by technology

Although the yield has been improved, there is still a certain gap between the high-purity silane silicon-containing gas raw material cost and the existence of certain safety hazards, and the demand for industrial production.

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