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Graphene-polymer micro-wire array, gas sensor, and preparation methods and application thereof

A gas sensor and graphene technology, applied in the direction of electric solid-state devices, semiconductor devices, instruments, etc., can solve the problems of cumbersome methods, difficult large-area preparation, poor sensitivity, etc., and achieve the effect of simple equipment, high detection sensitivity, and easy operation

Active Publication Date: 2017-06-13
INST OF CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the preparation process of conventional polymer-based arrayed gas sensors is cumbersome, requires special equipment, is difficult to prepare in large areas, and has poor sensitivity.

Method used

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  • Graphene-polymer micro-wire array, gas sensor, and preparation methods and application thereof
  • Graphene-polymer micro-wire array, gas sensor, and preparation methods and application thereof
  • Graphene-polymer micro-wire array, gas sensor, and preparation methods and application thereof

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preparation example Construction

[0042] Such as figure 1 and figure 2 Shown, the present invention also provides a kind of preparation method of graphene-polymer microwire array gas sensor, adopts this method to prepare the graphene-polymer microwire of high sensitivity, high selectivity and performance stability simply and quickly Array gas sensors. It includes the following steps:

[0043] S1. Prepare graphene micro-wire array 20 by liquid bridge induction method, specifically including:

[0044] S11, setting the substrate 10, and ultrasonically dispersing the graphene in the first solvent to form a graphene dispersion, and then placing the graphene dispersion on the substrate 10;

[0045] S12. Using the silicon pillars with micron array structure as the template 40, drop the graphene dispersion on the template 40 to form a sandwich structure. Wherein, the template 40 is a silicon pillar with a patterned micron array structure. For example, the template 40 can be obtained by photolithography.

[0046...

Embodiment 1

[0054] (1) Fabrication of large-area graphene microwire arrays by liquid bridge induction method

[0055] A silicon pillar with a pattern of a micron size is selected as a template, the size (width) of the silicon pillar is 2 μm, and the distance between the silicon pillars is 2 μm. Graphene is ultrasonically dispersed in water to form a graphene dispersion with a concentration of 800ppm, and the dispersion is added dropwise on the ITO glass substrate. Place the silicon pillar template on top to form a sandwich structure. After standing at room temperature for 24 hours, after the solvent in the graphene dispersion layer between the substrate and the template volatilized, the silicon pillar template was removed, and a large-area graphene micro-line array was formed on the substrate due to the liquid bridge-induced shrinkage. Used in the next step to prepare polymer-coated gas sensors. see details figure 1 Step (a) and step (b) in.

[0056] (2) Preparation of graphene-polyme...

Embodiment 2

[0062] (1) Fabrication of large-area graphene microwire arrays by liquid bridge induction method

[0063] Silicon pillars with micron-sized patterns are selected as the template, the size (width) of the silicon pillars is 3 μm, and the distance between the silicon pillars is 3 μm. Graphene is ultrasonically dispersed in water to form a graphene dispersion with a concentration of 1200ppm, and the dispersion is added dropwise on the silicon wafer substrate. Place the silicon pillar template on top to form a sandwich structure. After standing at room temperature for 24 hours, after the solvent in the graphene dispersion layer between the substrate and the template volatilized, the silicon pillar template was removed, and a graphene microwire array was formed on the substrate due to the liquid bridge-induced shrinkage, which is used for the following One-step fabrication of polymer-coated gas sensors. See the process for details figure 1 Step (a) and step (b) in.

[0064] (2) ...

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Abstract

The invention discloses a graphene-polymer micro-wire array, a gas sensor, and preparation methods and application thereof. The graphene-polymer micro-wire array comprises a graphene micro-wire array and a polymer film layer coated thereon; and the graphene micro-wire array is in one-dimensional distribution, mutually parallel, and extends along the one-dimensional distribution direction. According to the graphene-polymer micro-wire array and the gas sensor prepared by the invention, the disadvantages of high cost, complex process, low detection efficiency, poor sensitivity, limited detection path after swelling and requirement of special instruments and equipment when the gas sensor is prepared by simply utilizing a polymer film in the prior art can be overcome; the machinable property is good; furthermore, large-area preparation can be realized; therefore, high detection sensitivity, selectivity and performance stability are ensured; by means of the method, the width of the graphene-polymer micro-wire array can be adjusted in the preparation process; and thus, the method is hopefully and widely used in the aspects, such as food monitoring and atmospheric pollutant monitoring.

Description

technical field [0001] The invention belongs to the technical field of sensor device preparation, and in particular relates to a graphene-polymer micron line array and a gas sensor as well as their preparation method and application. Background technique [0002] As a highly sensitive and highly selective means of gas detection, gas sensors have been extensively studied since the 1930s. However, this field has reached a critical moment of upgrading both in terms of industrial applications and basic research. On the one hand, with the frequent occurrence of events affecting human health and living standards in recent years, such as the greenhouse effect and the destruction of the ozone layer, the requirements for the types of detectable gases have increased. From the original reducing gases, such as hydrogen, methane, etc., to toxic gases such as carbon monoxide, nitric oxide, etc. and food-related gases. On the other hand, the higher requirements for the detection limit, s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/00B81B7/04B81C1/00G01N27/12
CPCB81B7/0009B81B7/04B81C1/00031G01N27/126
Inventor 阚晓楠姜翔宇苏彬江雷
Owner INST OF CHEM CHINESE ACAD OF SCI
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