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A method for preparing three-dimensional mesoscopic device

A three-dimensional mesoscopic and device technology, which is applied in the direction of manufacturing microstructure devices, microstructure devices, and techniques for producing decorative surface effects, etc., can solve large-scale production obstacles, interrupt production processes, and increase time-consuming preparation of mesoscopic devices Problems such as production area, to achieve excellent mechanical properties, low internal friction, high strength

Active Publication Date: 2018-11-27
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] At the same time, since most of the current manufacturing technologies are in the process of serial production lines in the actual production process, each production step must be completed after the previous production process before proceeding to the next process, which greatly increases the preparation consumption of mesoscopic devices. time and the overall production area, and once a problem occurs in one of the links, the entire production process will be interrupted, which becomes an obstacle to mass production

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  • A method for preparing three-dimensional mesoscopic device
  • A method for preparing three-dimensional mesoscopic device
  • A method for preparing three-dimensional mesoscopic device

Examples

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Embodiment 1

[0048] Embodiment 1, utilize the Pd that diameter is 30 microns 40 Ni 10 Cu 30 P 20 Fabrication of microsprings with an outer diameter of 300 microns using metallic glass fibers

[0049] 1, prepare the palladium (Pd) base metal glass fiber of required diameter: adopt in supercooled liquid phase region, the palladium base metal (atomic percentage is Pd) that diameter is 1 millimeter 40 Ni 10 Cu 30 P 20 ) glass rods for thermoplastic stretching to produce Pd-based metal glass fibers with a diameter of about 30 microns.

[0050] 2. Provide a cylindrical fixed shape mold, such as figure 1 As shown, the fixed shape mold 11 is a cylindrical stainless steel column with a diameter of 240 microns and a length of 30 mm, with matching mechanical fixtures 12 attached at both ends.

[0051] 3. The Pd-based metal glass fiber with a diameter of 30 microns prepared in step 1 is elastically wound by means of the cylindrical fixed shape mold 11 in step 2, and the required three-dimensio...

Embodiment 2

[0078] Embodiment 2, utilize the Mg that diameter is 10 microns 65 Cu 25 Gd 10 Fabrication of microscale springs with an outer diameter of 100 microns using metallic glass fibers

[0079] The method and steps of this example are basically the same as in Example 1.

[0080] When preparing magnesium-based metallic glass microscale springs, the power density of the irradiated nanosecond pulsed laser is 2.75×10 11 J / (m 2 s), the irradiation time is 20 minutes.

[0081] The size and shape parameters of the prepared Mg-based metallic glass microscale springs were observed by scanning electron microscope (SEM). Such as Figure 10 As shown, the outer diameter of the micro-scale spring made of Mg-based metallic glass fibers with a diameter of 10 microns is about 100 microns, and the distance between nodes is about 46.5 microns. It can be seen from the figure that there is no obvious shear band on the surface of the metallic glass micro-scale spring, which shows that the method f...

Embodiment 3

[0083] Embodiment 3, utilize the Zr that diameter is 40 microns 52.5 Ti 5 Al 10 Cu 17.9 Ni 14.6 Fabrication of microscale springs with an outer diameter of 380 microns using metallic glass fibers

[0084] The method and steps of this example are basically the same as in Example 1.

[0085] When preparing zirconium-based metallic glass microscale springs, the power density of the irradiated nanosecond pulsed laser is 4.55×10 11 J / (m 2 s), the irradiation time is 20 minutes.

[0086] The size and shape parameters of the prepared zirconium-based metallic glass microscale springs were observed by scanning electron microscope (SEM). Such as Figure 10 As shown, the outer diameter of the microscale spring made of Zr-based metallic glass fibers with a diameter of 40 microns is about 380 microns, and the distance between nodes is about 131.1 microns. It can be seen from the figure that there is no obvious shear band on the surface of the metallic glass micro-scale spring, whi...

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Abstract

The invention relates to a method for preparing a three-dimensional mesoscopic device. The method comprises the following steps: preparing a micro-nano scale metallic glass strip or a metallic glass fiber, and performing elastic folding by means of a die of a fixed shape and forming the desired three-dimensional shape and then fixing; by controlling the energy density and irradiation time of lasers or plasmas and the rotation speed of a rotatable support frame, making the three-dimensional shape of the metallic glass strip or the metallic glass fiber formed by elastic folding generate structural relaxation quickly, so as to finish rapid shaping of the three-dimensional shape; and taking down the metallic glass strip or the metallic glass fiber, then the three-dimensional mesoscopic device of the desired shape is obtained. The preparation method of the invention is simple and easy and convenient for industrialization.

Description

technical field [0001] The invention relates to a method for preparing a three-dimensional mesoscopic device. Specifically, the present invention relates to a method for preparing three-dimensional functional mesoscopic (micro-nanoscale) devices using metallic glass materials under the condition of low-energy-density pulsed laser irradiation. Background technique [0002] Mesoscopic physics is a new subdiscipline in physics that is often mentioned in condensed matter physics these days. The term "mesoscopic" was coined by Van Kampen in 1981 and refers to a system between the micro and macro scales. Generally speaking, the scale of mesoscopic system is between nanometer and millimeter. Objects at the mesoscopic scale are already macroscopic in size, so they have the characteristics of a macroscopic system; however, due to the coherence of electron motion, a series of new interference phenomena related to the phase of quantum mechanics will appear, which is also related to t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
CPCB81C1/00182
Inventor 高萌赵德乾潘明祥汪卫华
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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