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Preparation method of high-sensitivity surface-enhanced Raman scattering substrate

A surface-enhanced Raman, high-sensitivity technology, used in Raman scattering, material excitation analysis, etc., can solve the problems of complex steps, poor concentration control, and low yield, and achieve a simple preparation process, high uniformity, and high sensitivity. Effect

Active Publication Date: 2017-07-25
WUHAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The reported chemical preparation methods have disadvantages such as complicated steps, poor concentration control, and low yield

Method used

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  • Preparation method of high-sensitivity surface-enhanced Raman scattering substrate
  • Preparation method of high-sensitivity surface-enhanced Raman scattering substrate
  • Preparation method of high-sensitivity surface-enhanced Raman scattering substrate

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Experimental program
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Effect test

Embodiment 1

[0031] Firstly, WO was deposited on the quartz substrate by ultra-high vacuum magnetron sputtering (ULVAC ACS-400). 3 Thin film, the substrate is heated at 400°C, the deposition thickness is 70nm, and then the Ar + Ions were irradiated onto the film with an ion energy of 190keV and a dose of 1×10 17 ions / cm 2 .

[0032] The irradiated samples were then annealed in a conventional tubular annealing furnace under vacuum at a pressure of -4 Pa, for irradiated WO 3 , the annealing temperature was 500°C, kept for 1 hour, and then cooled naturally.

Embodiment 2

[0034] Using a 200kV ion implanter produced by Beijing Zhongkexin Electronic Equipment Co., Ltd., the energy was 50keV, and the dose was 1×10 17 ions / cm 2 Ar + Ion irradiation onto TiO 2 single crystal.

[0035] All irradiated samples were then annealed in a conventional tubular annealing furnace under vacuum at - 4 Pa, for irradiated TiO 2 , the annealing temperature was 500°C, kept for 1 hour, and then cooled naturally.

Embodiment 3

[0037] 45keV, dose 1×10 17 ions / cm 2 N + Ion irradiation onto TiO 2 single crystal.

[0038] All irradiated samples were then annealed in a conventional tubular annealing furnace under vacuum at - 4 Pa, for irradiated TiO 2 , the annealing temperature was 500°C, kept for 1 hour, and then cooled naturally.

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Abstract

The invention discloses a preparation method of a high-sensitivity surface-enhanced Raman scattering substrate and belongs to the field of application of spectral molecular detection materials. According to the method, a series of oxygen vacancy energy levels are introduced into a semiconductor bandgap by means of ion beam irradiation, photo-excited charge between the energy levels in the semiconductor bandgap and a matched molecular energy level can be transferred more efficiently, and molecular Raman signal intensity of a detection material is improved greatly; by combining ion beam irradiation and vacuum annealing, molecular Raman signal intensity is further increased, highest sensitivity in all semiconductor materials internationally reported at present is acquired, and it is even possible for the detection material to compare with non-hot-spot noble metal materials in terms of property. Compared with other preparation methods, the preparation method of the invention has the greatest advantages that the technique is mature and suitable for industrial production, large-scale preparation of high-sensitivity non-metallic surface-enhanced Raman scattering substrate materials is available, the prepared product has low cost, and detection signals are stable and uniform.

Description

technical field [0001] The invention belongs to the field of spectral detection materials, and specifically relates to the preparation of WO rich in oxygen vacancies by means of ion implantation combined with heat treatment. 3-x 、TiO 2-x and ZnO 1-x Surface-enhanced Raman scattering substrates. Background technique [0002] As a very fast and highly sensitive spectral detection technology, surface-enhanced Raman scattering technology has great application potential in many fields such as analytical chemistry, catalysis, and biochemical detection. The strong surface-enhanced Raman scattering effect is the guarantee of high detection sensitivity, and the substrate material is the key to produce a strong surface-enhanced Raman scattering effect. [0003] At present, the mainstream base materials are precious metals, such as gold, silver, copper and so on. However, noble metal substrate materials have some disadvantages that severely restrict their practical applications, su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65
Inventor 任峰郑旭东吴恒毅蔡光旭蒋昌忠
Owner WUHAN UNIV
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