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Preparation method of germane purification additive

A germane and auxiliary technology is applied in the field of preparation of germane purification auxiliary, which can solve the problems of long consumption time and complicated impurity adsorption treatment process, and achieve the effects of large amount of adsorbed impurities, fast adsorption speed and high purity.

Inactive Publication Date: 2017-09-08
义乌市诠铈新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Most of the existing germane purification processes have the disadvantages of complicated impurity adsorption process and long time consumption

Method used

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  • Preparation method of germane purification additive

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Add 1000Kg water, 100Kg styrene, 8Kg norbornene-2,3-dicarboxyimino p-nitrobenzyl carbonate, 0.8Kg three (acetonitrile) cyclopentadienyl ruthenium hexafluoro Phosphoric acid, 0.6Kg potassium persulfate, 1Kg sodium dodecylbenzenesulfonate, 1.5Kg diethylene glycol divinyl ether, 1Kg10-vinyl undecylenate, 1.5Kg 3,7-dimethyl-1, For 6-octadiene, react at 100°C for 15 hours, filter the product, and dry to obtain an adsorbent for germane purification.

Embodiment 2

[0026] Add 1000Kg water, 100Kg styrene, 5Kg norbornene-2,3-dicarboxyimino-p-nitrobenzyl carbonate, 0.5Kg tris(acetonitrile)cyclopentadienyl ruthenium hexafluoro in 2000L reactor Phosphoric acid, 0.5Kg potassium persulfate, 0.5Kg sodium dodecylbenzene sulfonate, 1Kg diethylene glycol divinyl ether, 0.5Kg 10-vinyl undecylenate, 1Kg 3,7-dimethyl-1, For 6-octadiene, react at 80°C for 10 hours, filter the product, and dry to obtain an adsorbent for germane purification.

Embodiment 3

[0028] In 2000L reactor, add 1000Kg water, 100Kg styrene, 10Kg norbornene-2,3-dicarboxyimino p-nitrobenzyl carbonate, 1Kg three (acetonitrile) cyclopentadienyl ruthenium hexafluorophosphate , 0.8Kg potassium persulfate, 1.5Kg sodium dodecylbenzene sulfonate, 2Kg diethylene glycol divinyl ether, 1.5Kg 10-vinyl undecylenate, 2Kg 3,7-dimethyl-1,6 - Octadiene, react at 120°C for 20 hours, filter the product, and dry to obtain an adsorbent for germane purification.

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PUM

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Abstract

The invention provides a preparation method of a germane purification additive. A certain amount of styrene is dispersed in water; norbornene-2, 3-dicarboxyl imidogen nitrobenzyl carbonate ester, tris(acetonitrile) cyclopentadienyl ruthenium hexafluorophate, potassium persulfate, sodium dodecyl benzene sulfonate, diethylene glycol divinyl ether, vinyl 10-undecenoate and 3, 7-dimethyl-1 and 6-octadiene are added in proportion; heating is conducted, and a reaction is carried out at a suitable temperature; after the reaction ends, the product is filtered and dried, and an adsorbent for germane purification is obtained.

Description

technical field [0001] The invention relates to a method for purifying germane, in particular to a method for preparing a germane purification aid. Background technique [0002] Germane is a colorless, highly toxic, spontaneously combustible, non-corrosive gas. Poor thermal stability, germane is slowly oxidized at 160-180 °C, germane can be detected to decompose into germanium and hydrogen at about 280 °C, and germane is almost completely decomposed into elemental germanium and hydrogen at 350 °C; the self-catalysis of germane Very strong, once it decomposes to form a metal covering film, it will decompose rapidly, so its decomposition explosion risk is very high. Germane is generally synthesized by chemical reduction method, electrochemical reaction method, and plasma synthesis method, and has important uses in the semiconductor industry. High-purity germane products are required in many industrial activities, especially in the semiconductor and solar fields. [0003] CN...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/26B01J20/30C08F212/08C08F216/12C08F220/40C08F232/08C08F236/16C08F236/20C01B6/06
CPCB01J20/262C01B6/06C08F212/08C08F232/08C08F236/16C08F216/125C08F220/40C08F236/20
Inventor 张玲
Owner 义乌市诠铈新材料有限公司