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Preparation method of high-density ITO target molded by slip casting

A slip-casting, high-density technology, applied in ceramic molding machines, manufacturing tools, ion implantation plating, etc., can solve the problems of low relative density of target materials and high waste rate of green bodies, and achieve good stability and low viscosity Effect

Inactive Publication Date: 2017-10-03
ANHUI TUOJITAI NOVEL CERAMIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides a double-dispersant grouting method to produce high-density ITO targets, which solves the problem of high green body waste rate and relatively low relative density of targets obtained during the preparation process of existing ITO targets by wet molding. The problem

Method used

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  • Preparation method of high-density ITO target molded by slip casting
  • Preparation method of high-density ITO target molded by slip casting

Examples

Experimental program
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Embodiment 1

[0028] This embodiment provides a method for preparing a high-density ITO target by slip casting, which includes the following steps:

[0029] (1) Preparation of the premix: take the dispersant and add it to water, stir evenly, adjust the pH value to 9 with ammonia water to obtain the premix; the amount of the dispersant added is 2.2% of the mass of the ITO powder, and the amount of water added is the ITO powder 15% of mass;

[0030] (2) Preparation of suspension slurry: add ITO powder to the premixed liquid, and then carry out wet grinding through a ball mill; the viscosity value of the prepared ITO slurry is 195mPa s (room temperature, rotating speed 20s -1 )

[0031] (3) Green body molding: vacuum degass the slurry after ball milling, inject the degassed slurry into a gypsum mold; remove the mold after suction molding, and dry the green body for 72 hours to obtain an ITO green body (see figure 1 );

[0032] (4) Degreasing: place the dried ITO green body in a degreasing f...

Embodiment 2

[0040] This embodiment provides a method for preparing a high-density ITO target by slip casting, which includes the following steps:

[0041] (1) Preparation of the premix: take the dispersant and add it to water, stir evenly, adjust the pH value to 8 with ammonia water to obtain the premix; the amount of the dispersant is 3.0% of the mass of the ITO powder, and the amount of water is 3.0% of the ITO powder 10% of mass;

[0042] (2) Preparation of suspension slurry: add ITO powder to the premixed liquid, and then carry out wet grinding through a ball mill; the viscosity value of the prepared ITO slurry is 240mPa s (room temperature, rotating speed 20s -1 )

[0043] (3) Body molding: vacuum degass the slurry after ball milling, inject the degassed slurry into a gypsum mold; remove the mold after suction molding, and dry the green body for 80 hours to obtain an ITO body;

[0044] (4) Degreasing: place the dried ITO green body in a degreasing furnace to raise the temperature t...

Embodiment 3

[0052] This embodiment provides a method for preparing a high-density ITO target by slip casting, which includes the following steps:

[0053] (1) Preparation of the premix: take the dispersant and add it to water, stir evenly, adjust the pH value to 11 with ammonia water to obtain the premix; the amount of the dispersant is 1.5% of the mass of the ITO powder, and the amount of water is 1.5% of the ITO powder 20% of mass;

[0054] (2) Preparation of suspension slurry: add ITO powder to the premixed liquid, and then carry out wet grinding through a ball mill; prepare the ITO slurry with a viscosity value of 140mPa s (room temperature, rotating speed 20s -1 )

[0055] (3) Body molding: vacuum degass the slurry after ball milling, inject the degassed slurry into a gypsum mold; remove the mold after suction molding, and dry the green body for 84 hours to obtain an ITO body;

[0056] (4) Degreasing: place the dried ITO green body in a degreasing furnace to raise the temperature t...

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Abstract

The invention discloses a preparation method of a high-density ITO target molded by slip casting. The preparation method comprises adding a dispersant into water, stirring evenly the solution, adjusting the pH to 8 to 11 through ammonium hydroxide so that a premixed solution is obtained, adding ITO powder into the premixed solution, carrying out wet grinding by a ball mill, carrying out vacuum degassing on the slurry, injecting the degassed slurry into a gypsum mold, carrying out slurry suction molding, carrying out demolding, airing a green body for 72h or more to obtain an ITO biscuit and sintering the ITO biscuit to obtain the ITO target. Through the process route of pouring and molding and non-pressure ITO target sintering in the oxygen atmosphere, the high-density high-quality ITO target is produced in a low cost.

Description

technical field [0001] The invention relates to the technical field of indium tin oxide target preparation, in particular to a method for preparing a high-density ITO target by slip casting. Background technique [0002] The main component of ITO (tin indium oxide) is a composite oxide in which tin oxide is dissolved in indium oxide. ITO has good photoelectric properties, and ITO films have high conductivity and visible light transmittance, and are widely used in various fields such as solar cells, liquid crystal display devices, and touch panels. With the rapid popularization of liquid crystal flat panel display devices, etc., the consumption of ITO target materials is increasing, and the requirements for target materials are also getting higher and higher. At present, the use of nanomaterials to prepare low-temperature sintered ITO targets is the direction of unremitting efforts of target researchers. Although the common method is to prepare nano-ITO powders by co-precipi...

Claims

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Application Information

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IPC IPC(8): C04B35/01C04B35/457C04B35/626C04B35/622C04B35/64B28B1/26C23C14/34
CPCB28B1/26C04B35/01C04B35/457C04B35/622C04B35/6261C04B35/6264C04B35/64C04B2235/3286C04B2235/3293C04B2235/6022C04B2235/6583C04B2235/668C04B2235/77C23C14/3414
Inventor 张天舒宋晓超蒋卫国钱邦正
Owner ANHUI TUOJITAI NOVEL CERAMIC TECH
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