Preparation method of high-density ITO target molded by slip casting

A slip-casting, high-density technology, applied in ceramic molding machines, manufacturing tools, ion implantation plating, etc., can solve the problems of low relative density of target materials and high waste rate of green bodies, and achieve good stability and low viscosity Effect

Inactive Publication Date: 2017-10-03
ANHUI TUOJITAI NOVEL CERAMIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention provides a double-dispersant grouting method to produce high-density ITO targets, which solves the problem of high green bo

Method used

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  • Preparation method of high-density ITO target molded by slip casting
  • Preparation method of high-density ITO target molded by slip casting

Examples

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Example Embodiment

[0027] Example 1

[0028] This embodiment provides a method for preparing a high-density ITO target by grouting, which includes the following steps:

[0029] (1) Preparation of premixed liquid: add dispersant to water, stir evenly, adjust pH to 9 with ammonia water to obtain premixed liquid; the added amount of dispersant is 2.2% of the mass of ITO powder, and the added amount of water is ITO powder 15% of quality;

[0030] (2) Preparation of suspension slurry: add ITO powder to the premix solution, and then wet-grind it with a ball mill; prepare the ITO slurry with a viscosity value of 195mPa·s (room temperature, rotation speed 20s -1 )

[0031] (3) Green body forming: vacuum degass the slurry after ball milling, and inject the degassed slurry into the gypsum mold; after the slurry is sucked and molded, the green body is demolded, and the green body is dried for 72 hours to obtain an ITO body (see figure 1 );

[0032] (4) Degreasing: Place the dried ITO body in a degreasing furnace at...

Example Embodiment

[0039] Example 2

[0040] This embodiment provides a method for preparing a high-density ITO target by grouting, which includes the following steps:

[0041] (1) Preparation of premixed solution: add dispersant to water, stir evenly, adjust the pH value to 8 with ammonia water to obtain premixed solution; the added amount of dispersant is 3.0% of the mass of ITO powder, and the added amount of water is ITO powder 10% of quality;

[0042] (2) Preparation of suspension slurry: add ITO powder to the premix, and then wet-grind it with a ball mill; prepare the ITO slurry with a viscosity value of 240mPa·s (room temperature, speed 20s -1 )

[0043] (3) Green body forming: vacuum degass the slurry after ball milling, and inject the degassed slurry into a gypsum mold; after the slurry is sucked and molded, the green body is demolded, and the green body is dried for 80 hours to obtain an ITO body;

[0044] (4) Degreasing: Place the dried ITO body in a degreasing furnace at a temperature of 0.5°...

Example Embodiment

[0051] Example 3

[0052] This embodiment provides a method for preparing a high-density ITO target by grouting, which includes the following steps:

[0053] (1) Preparation of premixed solution: add dispersant to water, stir evenly, adjust pH to 11 with ammonia water to obtain premixed solution; the added amount of dispersant is 1.5% of the mass of ITO powder, and the amount of water added is ITO powder 20% of quality;

[0054] (2) Preparation of suspension slurry: add ITO powder to the premix, and then wet-grind it with a ball mill; prepare the ITO slurry with a viscosity value of 140mPa·s (room temperature, rotation speed 20s -1 )

[0055] (3) Green body forming: vacuum degas the slurry after ball milling, and pour the degassed slurry into a gypsum mold; after the slurry is sucked and formed, the green body is demolded, and the green body is dried for 84 hours to obtain an ITO body;

[0056] (4) Degreasing: Place the dried ITO body in a degreasing furnace at a temperature of 0.5°C / m...

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Abstract

The invention discloses a preparation method of a high-density ITO target molded by slip casting. The preparation method comprises adding a dispersant into water, stirring evenly the solution, adjusting the pH to 8 to 11 through ammonium hydroxide so that a premixed solution is obtained, adding ITO powder into the premixed solution, carrying out wet grinding by a ball mill, carrying out vacuum degassing on the slurry, injecting the degassed slurry into a gypsum mold, carrying out slurry suction molding, carrying out demolding, airing a green body for 72h or more to obtain an ITO biscuit and sintering the ITO biscuit to obtain the ITO target. Through the process route of pouring and molding and non-pressure ITO target sintering in the oxygen atmosphere, the high-density high-quality ITO target is produced in a low cost.

Description

technical field [0001] The invention relates to the technical field of indium tin oxide target preparation, in particular to a method for preparing a high-density ITO target by slip casting. Background technique [0002] The main component of ITO (tin indium oxide) is a composite oxide in which tin oxide is dissolved in indium oxide. ITO has good photoelectric properties, and ITO films have high conductivity and visible light transmittance, and are widely used in various fields such as solar cells, liquid crystal display devices, and touch panels. With the rapid popularization of liquid crystal flat panel display devices, etc., the consumption of ITO target materials is increasing, and the requirements for target materials are also getting higher and higher. At present, the use of nanomaterials to prepare low-temperature sintered ITO targets is the direction of unremitting efforts of target researchers. Although the common method is to prepare nano-ITO powders by co-precipi...

Claims

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Application Information

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IPC IPC(8): C04B35/01C04B35/457C04B35/626C04B35/622C04B35/64B28B1/26C23C14/34
CPCB28B1/26C04B35/01C04B35/457C04B35/622C04B35/6261C04B35/6264C04B35/64C04B2235/3286C04B2235/3293C04B2235/6022C04B2235/6583C04B2235/668C04B2235/77C23C14/3414
Inventor 张天舒宋晓超蒋卫国钱邦正
Owner ANHUI TUOJITAI NOVEL CERAMIC TECH
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