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Self-assembly nano oxynitride coating as well as preparation method thereof and application thereof

A technology of oxynitride and self-assembly, applied in coating, nanotechnology, metal material coating technology, etc., can solve the problems of high brittleness of oxide coating, increase equipment cost, limit popularization and application, etc., and achieve good economic benefits , low cost and strong operability

Active Publication Date: 2017-10-24
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with nitride coatings, oxide coatings have better thermochemical stability. For example, the heat resistance of alumina coatings can reach above 1200 °C, but oxide coatings are highly brittle and low in hardness (less than 20GPa)
TiCN / Al 2 o 3 Composite coatings such as TiAlN / TiN improve the high-temperature performance of the coating to a certain extent, and are designed by alternating multilayer (10-400 layers) of oxide / nitride, TiAlN / Al 2 o 3 The multi-layer tool coating has the advantages of nitride hardness, good toughness and excellent high-temperature chemical stability of the oxide, and performs well in high-speed cutting and hot-working die processing aluminum; due to the high insulation of alumina, the coating needs to be used Special RF (radio frequency) sputtering and BP-DMS (bipolar pulsed twin target sputtering) technologies increase equipment costs and low deposition rates limit their popularization and application

Method used

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  • Self-assembly nano oxynitride coating as well as preparation method thereof and application thereof
  • Self-assembly nano oxynitride coating as well as preparation method thereof and application thereof
  • Self-assembly nano oxynitride coating as well as preparation method thereof and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] A self-assembled nano-oxynitride coating includes an oxygen-rich layer AlCrSiON and a nitrogen-rich layer AlCrSiON. Among them, the thickness of the oxygen-rich layer is 2nm, the thickness of the nitrogen-rich layer is 5nm, and the atomic percentage content of each element in the coating is: Al: 20at.%, Cr: 10at.%, Si: 15at.%, O: 50at. .%, N: 5at.%.

[0031] The high-speed steel substrate is polished, ultrasonically cleaned with acetone and alcohol for 10 minutes, dried with nitrogen, and then put into a vacuum chamber. Install the target Cr target and AlCrSi target into the equipment, turn on the heater and raise the temperature to 300℃, and evacuate the vacuum chamber to a vacuum degree of 1.0×10 -3 Pa below. 300sccm of Ar gas was introduced, the workpiece support bias was set to -1000V, and the surface of the substrate was sputtered cleaning, and the bombardment time was 10min. After that, the bias voltage is reduced to -600V, the Cr target is ignited, the target curr...

Embodiment 2

[0035] A self-assembled nano multilayer oxynitride coating includes an oxygen-rich layer AlCrSiON and a nitrogen-rich layer AlCrSiON. Among them, the thickness of the oxygen-rich layer is 8nm, the thickness of the nitrogen-rich layer is 30nm, and the atomic percentage content of each element in the coating is: Al: 25at.%, Cr: 15at.%, Si: 5at.%, O: 5at. .%, N: 50at.%.

[0036] The cemented carbide substrate is polished, ultrasonically cleaned with acetone and alcohol for 15 minutes, dried with nitrogen, and then put into a vacuum chamber. Install the target Cr target and AlCrSi target into the equipment, turn on the heater and raise the temperature to 350℃, and evacuate the vacuum chamber to a vacuum of 5.0×10 -3 Pa below. Ar gas of 250 sccm was introduced, the workpiece support was set to be biased at -800V, and the surface of the substrate was sputtered and cleaned, and the bombardment time was 20 minutes. After that, the bias voltage is reduced to -800V, the Cr target is igni...

Embodiment 3

[0038] A self-assembled nano multilayer oxynitride coating includes an oxygen-rich layer AlCrSiON and a nitrogen-rich layer AlCrSiON. Among them, the thickness of the oxygen-rich layer is 12nm, the thickness of the nitrogen-rich layer is 60nm, and the atomic percentage content of each element in the coating is: Al: 30at.%, Cr: 20at.%, Si: 10at.%, O: 15at. .%, N: 25at.%.

[0039] The high-speed steel substrate is polished, ultrasonically cleaned with acetone and alcohol for 15 minutes, then dried with nitrogen, and then put into the vacuum chamber. Install the target Cr target and AlCrSi target into the equipment, turn on the heater and raise the temperature to 400℃, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Pa below. 300sccm of Ar gas was introduced, the workpiece support was biased at -900V, and the surface of the substrate was sputtered and cleaned, and the bombardment time was 15 minutes. After that, the bias voltage is reduced to -700V, the Cr target i...

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Abstract

The invention discloses a preparation method for a self-assembly nano oxynitride coating. A traditional PVD technology is adopted to prepare the self-assembly nano oxynitride coating; retention time, in different plasma regions, of a sample is changed by regulating autorotation and revolution speed of the sample according to a phenomenon that plasma energy and energy distribution within different distance ranges of a target is different, so that the self-assembly nano oxynitride coating is prepared. The coating comprises an oxygen-rich layer and a nitrogen-rich layer, wherein the oxygen-rich layer and the nitrogen-rich layer are alternatively deposited on a base body; and the coating comprises the following components: 20-35at.% of Al, 10-25at.% of Cr, 0-15at.% of Si, 5-50at.% of O and 10-50 at.% of N. The preparation method is simple in preparation process, is low in cost, is good in adaptation, integrates the advantages of a nitride coating and an oxide coating, and has great application and popularization potential.

Description

Technical field [0001] The invention belongs to the field of material coatings, and more specifically, relates to a self-assembled nano-oxynitride coating and a preparation method and application thereof. Background technique [0002] In recent years, the use of PVD technology to coat metal nitrides, oxides, carbides, etc. on tools, molds, mechanical parts and other products to improve product surface performance and service life has become a widely used surface modification technology. Among them, metal nitride coating is the mainstream of tool coating. With the development of processing technology, high-temperature application environments such as high-speed cutting tools and hot-work molds require higher and higher high-temperature performance of coatings. The high temperature oxidation resistance of TiC, HfC, TiN, CrN, TiCN and other traditional carbon (nitride) coatings is below 600℃, which cannot meet the requirements of high-speed cutting. In order to improve the heat re...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C14/32C23C14/02B82Y40/00
CPCB82Y40/00C23C14/0036C23C14/0084C23C14/022C23C14/0676C23C14/325C23C14/35
Inventor 王启民耿东森代伟吴正涛黎海旭
Owner GUANGDONG UNIV OF TECH
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