Coating process suitable for three-layer anti-reflection coating of polycrystalline solar cells

Abstract

The invention provides a coating process applicable to a three-layer anti-reflective film of a poly-silicon solar cell. By the coating process, the technical problems that an existing preparation process is relatively complicated, is large in power consumption and relatively high in preparation cost and a single-layer silicon nitride anti-reflective film silicon solar cell is also high in reflectivity and relatively high in rework ratio are solved. The coating process applicable to the three-layer anti-reflective film of the poly-silicon solar cell comprises the following steps of (a) cleaning, texturing, diffusing and etching a crystal silicon wafer; (b) arranging the crystal silicon wafer completed in the step (a) on a graphite boat by an assembly and disassembly sheet system, and placing the graphite boat in tubular plasma enhanced chemical vapor deposition (PECVD) for pre-precipitation and cleaning; (c) depositing the crystal silicon wafer completed in the step b by tubular PECVD; (d) depositing the crystal silicon wafer completed in the step c by tubular PECVD again; (e) depositing the crystal silicon wafer completed in the step d by tubular PECVD again; and (f) cooling the crystal silicon wafer in the graphite boat by the assembly and disassembly sheet system, and taking out the crystal silicon wafer. The coating process has the advantage of high product performance.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and relates to a coating process suitable for a three-layer anti-reflection film of a polycrystalline solar cell. Background technique [0002] A solar cell is a semi-permanent physical battery that converts sunlight energy into electrical energy. With the extreme consumption of fossil energy, the exhaustion of the generated energy and the increasingly serious greenhouse effect, the human demand for new clean energy has become more and more urgent . In the case of changing climate conditions and shortage of natural energy, photovoltaic power generation has attracted more and more attention from various countries. At this stage, both theoretical research on batteries and battery performance in experimental research and development have made great progress. raised to unimaginable levels. The conversion efficiencies of monocrystalline silicon and polycrystalline silicon in the laboratory have ...

AI Technical Summary

Problems solved by technology

[0004] Although the preparation process disclosed in this patent can realize the production of anti-reflection film, the preparation process is relatively complicated, consumes a lot of power, and the cost of preparation is relatively high, and the reflectivity of single-layer silicon nitride anti-reflection film silicon solar cells It is still very high, and the rework rate is also high. Therefore, it is necessary to design a coating process suitable for the three-layer anti-reflection coating of polycrystalline solar cells.

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