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Preparation method of super-hydrophobic diamond-like carbon film

A diamond film, super-hydrophobic technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of reducing the surface energy of the film, and achieve good hydrophobic stability, good hydrophobic properties, and low cost. Effect

Active Publication Date: 2018-02-13
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims at the deficiency of the existing diamond-like film hydrophobic performance control, and provides a simple, efficient, economical and environment-friendly super-hydrophobic diamond-like film preparation method. Modification, on the one hand, binary metal doping and heat treatment can increase the degree of graphitization of the film and reduce the surface energy of the film; on the other hand, one of the doping metals is a doping metal element that combines with carbon atoms to form a weak bond. Under heat treatment conditions, precipitation will occur and form nano-clusters to grow, so that a micro-nano composite structure can be constructed on the surface of the film, making the film super-hydrophobic.

Method used

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  • Preparation method of super-hydrophobic diamond-like carbon film
  • Preparation method of super-hydrophobic diamond-like carbon film
  • Preparation method of super-hydrophobic diamond-like carbon film

Examples

Experimental program
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Effect test

Embodiment 1

[0028] In this embodiment, the Cu / Cr co-doped diamond-like carbon film is obtained by linear ion beam compound magnetron sputtering technology, and the specific process is as follows:

[0029] A Cu / Cr alloy target is installed on the magnetron sputtering source to deposit metal Cu / Cr, and a carbon-containing gas source is passed into the linear ion beam source to deposit a diamond-like film. During the coating process, the magnetron sputtering is turned on at the same time source and linear ion source to achieve Cu / Cr co-doped diamond-like film deposition.

[0030] Heat treatment is carried out to this Cu / Cr co-doped diamond-like carbon film, specifically as follows:

[0031] The Cu / Cr co-doped diamond-like film is placed in a heat treatment furnace, heated to 550° C. under an Ar protection atmosphere, kept for 60 minutes, and then taken out.

[0032] The surface morphology of the diamond-like carbon film after the above-mentioned heat treatment is as follows: figure 1 As sh...

Embodiment 2

[0036] In this embodiment, the Ag / Ti co-doped diamond-like carbon film is obtained by vacuum cathode arc composite magnetron sputtering technology, and the specific process is as follows:

[0037] A graphite target is installed at the cathodic arc to realize the deposition of diamond-like film, and an Ag / Ti composite target is installed at the magnetron sputtering to realize the metal Ag / Ti doping. By simultaneously turning on the vacuum cathode arc source and the magnetic The sputtering source is controlled to realize the deposition of Ag / Ti co-doped diamond-like carbon film.

[0038] This Ag / Ti co-doped diamond-like carbon film is heat-treated, specifically as follows:

[0039] The Ag / Ti co-doped diamond-like carbon film was placed in a heat treatment furnace, heated to 650°C under the He protective atmosphere, kept for 40 minutes, and then taken out.

[0040] The surface topography of the diamond-like carbon film after the above heat treatment is similar to figure 1 As sh...

Embodiment 3

[0043] In this example, the Ni / W co-doped diamond-like carbon film was obtained by using linear ion beam compound vacuum cathode arc technology, and the specific process is as follows:

[0044] The Ni / W target is installed at the cathodic arc to realize the doping of metal Ni / W, and the carbon-containing gas source is passed into the linear ion beam source to deposit the diamond-like film. During the coating process, the vacuum cathodic arc source and The linear ion source realizes the deposition of Ni / W co-doped diamond-like carbon film.

[0045] Heat treatment is carried out to this Ni / W co-doped diamond-like carbon film, specifically as follows:

[0046] The Ni / W co-doped diamond-like film was placed in a heat treatment furnace, heated to 950°C under the He protection atmosphere, kept for 30 minutes, and then taken out.

[0047] The surface topography of the diamond-like carbon film after the above heat treatment is similar to figure 1 As shown, it shows that the surface ...

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Abstract

The invention provides a preparation method of a super-hydrophobic diamond-like carbon film. The preparation method comprises the steps that firstly a diamond-like carbon film with double-element metal being doped jointly is prepared, and heat treatment is conducted on the diamond-like carbon film with the double-element metal being doped jointly in inert gas shielding atmosphere. On one hand, thegraphitization degree of the film can be improved through double-element metal doping and heat treatment, and the surface energy of the film can be reduced; and on the other hand, one of the doped metal is a doped metal element which has a weak bond feature by being bonded with a carbon atom, separation can happen and nanoclusters can grow under the heat treatment condition, and thus a micro-nanocomposite structure can be built on the surface of the film, so that the film has a super-hydrophobic property. The preparation method is simple, efficient, economical and environmentally friendly, and has good application value.

Description

technical field [0001] The invention belongs to the technical field of diamond-like functional film materials, and relates to a preparation method of a superhydrophobic diamond-like film. Background technique [0002] As a surface functional material with good mechanical properties such as high hardness, low coefficient of friction, high wear resistance and corrosion resistance, wide light transmission range, excellent biocompatibility and other excellent properties, diamond-like carbon films (Diamond-like carbon, DLC) has shown great application potential in the fields of marine shipbuilding industry, aerospace engineering, automobile, printing and biomedicine. However, the inherent hydrophilicity of the film limits the application of DLC in many fields requiring superhydrophobic surfaces. [0003] The wettability of DLC can be regulated by constructing micro-nano-sized double structures, plasma treatment, adding elements, and changing deposition process parameters (pressu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/58C23C14/06C23C14/35C23C14/46C23C14/32
CPCC23C14/0605C23C14/325C23C14/35C23C14/46C23C14/5806
Inventor 孙丽丽汪爱英张栋郭鹏柯培玲左潇
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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