Color OLED micro display device based on laser thermal transfer printing and method for preparing same
A technology of laser thermal transfer and micro-display devices, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc., can solve problems such as the inability to improve the brightness and efficiency of OLED devices, and the limitation of the performance improvement of OLED micro-display devices. , to achieve the effect of promoting efficiency improvement, preventing degradation and improving performance
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Embodiment 1
[0034] like Figure 1-2 As shown, this embodiment discloses a color OLED microdisplay device based on laser thermal transfer, which includes a CMOS circuit silicon substrate 100, a pixel anode, an OLED thermal transfer layer 200, a pixel cathode, and an extremely thin film encapsulation layer 300 from bottom to top. , and a cover glass 400.
[0035] like Figure 3-5 As shown, each group of OLED heat transfer layers 200 includes a red light OLED heat transfer layer 201, a green light OLED heat transfer layer 202 and a blue light OLED heat transfer layer 203, and several groups of OLED heat transfer layers 200 form a matrix distributed. Each monochromatic thermal transfer layer includes at least one hole injection layer HIL2001, one hole transport layer HTL2002, one monochromatic light emitting layer EML2003, one electron transport layer ETL2004 and one electron injection layer EIL2005. A hole injection layer HIL2001, a hole transport layer HTL2002, a monochromatic light-emit...
Embodiment 2
[0042] This embodiment discloses a method for preparing the above-mentioned color OLED microdisplay device based on laser thermal transfer printing, comprising the following steps:
[0043] S1. Fabricate pixel anodes on the CMOS circuit silicon substrate 100 by magnetron sputtering.
[0044] S2. Place the donor element of the red OLED thermal transfer layer on the anode of the pixel, and use the laser beam to pass through the mask plate and the objective lens to form a square beam, and the laser beam will prepare the red OLED thermal transfer layer on the donor element Correspondingly transferred to the anode of the pixel to form a red OLED heat transfer layer 201 .
[0045] S4. Place the donor element of the green OLED thermal transfer layer on the anode of the pixel, use the laser beam to pass through the mask plate and the objective lens to form a square beam, and the laser beam will prepare the green OLED thermal transfer layer on the donor element Correspondingly transfe...
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Abstract
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