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Preparation method of molybdenum alloy barium titanate film

A barium titanate and molybdenum alloy technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of difficult control of processing cost, high price, and insufficient low temperature toughness

Inactive Publication Date: 2018-07-03
QINGDAO XIANGZHI ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the low-temperature toughness of the TZM plate is insufficient, and plastic forming is difficult; although the Mo-Re plate has excellent performance, because Re is a scarce metal, the price is expensive, and the processing cost is difficult to control; Brittleness, strength and plasticity will be reduced at the same time, which will affect its service life and increase production costs

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] The molybdenum alloy substrate of the molybdenum alloy sheet material of the present embodiment is made up of following weight components: 0.5% Mo 5 Si 3 / Y 2 o 3 ; The remainder is the matrix phase of pure molybdenum powder with an average particle size of <8 μm.

[0028] Will Mo 5 Si 3 / Y 2 o 3 , ball milled to an average particle size of 100-300nm.

[0029] According to the designed molybdenum doping material composition ratio, the pure molybdenum powder with an average particle size of 5 Si 3 / Y 2 o 3 Mixing, using traditional powder metallurgy methods to mix and press into sintered slabs.

[0030] The obtained sintered slab is heated to 1850° C. in a pure hydrogen atmosphere and kept for 5 hours for sintering; after cooling in the furnace, a sintered billet is obtained.

[0031] The obtained sintered billet is heated from room temperature to 1350° C. for hot rolling, and the deformation amount of each pass is 20%, and when the total deformation amount is...

Embodiment 2

[0039] The molybdenum alloy substrate of the molybdenum alloy sheet material of the present embodiment is made up of following weight components: 2% Mo 5 Si 3 / Y 2 o 3 ; The remainder is the matrix phase of pure molybdenum powder with an average particle size of <8 μm.

[0040] Will Mo 5 Si 3 / Y 2 o 3 , ball milled to an average particle size of 100-300nm.

[0041] According to the designed molybdenum doping material composition ratio, the pure molybdenum powder with an average particle size of 5 Si 3 / Y 2 o 3 Mixing, using traditional powder metallurgy methods to mix and press into sintered slabs.

[0042] The obtained sintered slab is heated to 2050° C. in a pure hydrogen atmosphere, and kept for 10 hours for sintering; after cooling with the furnace, a sintered billet is obtained.

[0043] The obtained sintered billet is heated from room temperature to 1500° C. for hot rolling, and the deformation of each pass is 35%, and when the total deformation is greater tha...

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PUM

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Abstract

The invention discloses a preparation method of a molybdenum alloy barium titanate film. The method can achieve an aim of remarkably improving and controlling the structure of the material; through the multi-layer film structure, migration of oxygen vacancy can be hindered, and the internal pressure stress of the BaTiO3 film surface can be increased; and therefore, the dielectric loss can be reduced while the dielectric constant can be raised, and the problems of leakage current, increase of dielectric loss and even failure caused by the oxygen vacancy generated in the preparation and serviceof the BaTiO3 film are solved.

Description

technical field [0001] The invention relates to the field of dielectric material manufacturing, in particular to a method for preparing a molybdenum alloy barium titanate film. Background technique [0002] BaTiO3 films with high dielectric constant have important application prospects in the fields of embedded capacitors and high energy storage components, especially the direct deposition of BaTiO3 films on Ni, Cu and other base metal substrates has attracted widespread attention in recent years, especially, The residual stress caused by the mismatch between the substrate and the film and the leakage current caused by the migration and redistribution of oxygen vacancies have attracted people's attention. [0003] Molybdenum and its alloys have the advantages of high melting point, high strength, good electrical and thermal conductivity, strong corrosion resistance and good high-temperature mechanical properties. At present, the series used in the high temperature field mai...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/08C23C14/58C22C1/05C22C1/10C22C27/04B22F3/10B22F3/24
CPCC23C14/35B22F3/1007B22F3/24B22F2003/242B22F2998/10C22C1/05C22C27/04C23C14/088C23C14/5806B22F1/0003B22F3/02
Inventor 不公告发明人
Owner QINGDAO XIANGZHI ELECTRONICS TECH CO LTD
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