Method for preparing metal film on polyimide substrate

Abstract

The invention relates to a method for preparing a metal film on a polyimide substrate, and belongs to the technical field of space-based early-warning radar antennas. In the method, a laser shock processing technology is introduced in a metal film magnetron sputtering deposition process, accordingly, the metal film deposition process and the laser shock processing process are alternately carried out, residual stress produced in the metal film deposition process is reduced, and the problems of curling deformation and cracking disengagement caused during preparation of the thick metal film (withthe thickness larger than or equal to 5 micrometers) are solved. By means of laser shock processing, the microstructure of the metal film can be changed, surface defects of the metal film are reduced, the specific resistance of the metal film is reduced, the electrical property and mechanical property of the prepared metal film / polyimide composite film are improved, and meanwhile the effective preparation method is provided for preparing high-quality high-precision low-weight space-based missile early warning radar flexible film antennas in China.

Description

technical field [0001] The invention relates to a method for preparing a metal film on a polyimide substrate, and belongs to the technical field of space-based early warning radar antennas. Background technique [0002] Space-based early warning radar is an important means of comprehensively obtaining information on space, air and ground military targets, and an important guarantee for seizing the right to control information. The space-based early warning radar platform has a high position, a wide field of vision, and is not restricted by national boundaries, weather and time. It can detect, track and identify ballistic missiles, strategic bombers, in-orbit weapons, other satellites, ships and other space or ground targets. and other integrated perception, providing reconnaissance and intelligence support for combat and military operations on a global scale. [0003] The area of ​​the space-based early warning radar antenna array can reach tens or even hundreds of square m...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problem that the metal film curls and deforms, or even cracks and falls off when preparing a thick metal film on a polyimide substrate in the prior art, the purpose of the present invention is to provide a method for preparing a metal film on a polyimide substrate , mainly using the combination of magnetron sputtering and laser shock treatment technology to reduce the residual stress generated during the deposition of the metal film on the polyimide substrate, change the microstructure of the metal film, and reduce the resistivity of the metal film, thereby solving the problem of Improve the electrical and mechanical properties of the prepared metal film / polyimide composite film due to the problems of curling deformation and cracking and falling off when preparing thick metal films