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Preparation method of MAX-phase coating

A M-A-X, coating technology, applied in the field of preparation of MAX phase coatings, can solve problems such as microstructure and mechanical property damage

Inactive Publication Date: 2018-07-27
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, too high annealing temperature will cause great damage to the microstructure and mechanical properties of commonly used metal substrate materials (titanium alloys, zirconium alloys, etc.)

Method used

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  • Preparation method of MAX-phase coating

Examples

Experimental program
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Effect test

preparation example Construction

[0018] The invention provides a preparation method of a MAX phase coating. The preparation method comprises the following steps:

[0019] S1, providing a base;

[0020] S2, using the cathodic arc ion plating method in combination with the magnetron sputtering method to deposit an M-A-X coating on the surface of the substrate, wherein the cathodic arc target provides an M source, and M in the M source is a transition group metal element, and the magnetron sputtering target provides A source, A in the A source is an Al element or a Si element, the reaction gas provides an X source, and X in the X source is a C element or an N element; and

[0021] S3, annealing the substrate deposited with the M-A-X coating to obtain a MAX phase coating.

[0022] Since the above-mentioned A source is Al element or Si element, if the A source is provided by the cathodic arc target, the structure of the A-rich coating is particularly loose, especially when the A source is Al element; moreover, i...

Embodiment 1

[0040] (1) Put the cleaned and dried zirconium alloy substrate into the vacuum chamber.

[0041] (2) Introduce 100 standard ml / min of argon gas into the vacuum chamber, set the linear anode ion source current to 0.2A, and the substrate bias voltage to -300V, and use ionized argon ions to etch the substrate for 40 minutes.

[0042] (3) The Ti transition layer was deposited by arc ion plating technology, the current of the arc target was 60A, the flow rate of argon gas was 200 standard ml / min, and the deposition thickness was 350nm.

[0043] (4) The Ti-Al-C coating is deposited on the surface of the Ti transition layer by using the cathodic arc ion plating method in combination with the magnetron sputtering method, wherein the cathodic arc target provides the Ti source, the magnetron sputtering target provides the Al source, and the reaction gas CH 4 C source is provided. The substrate is periodically placed in front of the cathodic arc target and the magnetron sputtering targ...

Embodiment 2

[0048] The only difference between Example 2 and Example 1 is that the annealing temperature of Example 2 is 600° C., and the holding time is 20 h. The X-ray diffraction spectrum of the coating after annealing is as follows image 3 As shown, Ti with better crystallinity was obtained 2 The MAX phase coating of AlC has a thickness of about 9 μm.

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Abstract

The invention relates to a preparation method of an MAX-phase coating. The preparation method comprises the following steps: providing a substrate; depositing an M-A-X coating on the surface of the substrate by combining a cathode arc ion plating method with a magnetron sputtering method, wherein an M source is provided by a cathode arc target, M in the M source stands for a transition metal element, an A source is provided by a magnetron sputtering target, A in the A source stands for an Al element or a Si element, an X source is provided by a reaction gas, and X in the X source stands for aC element or a N element; and carrying out annealing treatment on the substrate with the deposited M-A-X coating, so as to obtain the MAX-phase coating. According to the preparation method provided bythe invention, an M-element-rich coating and an A-element-rich coating are alternately formed by combining the cathode arc ion plating method with the magnetron sputtering method; M atoms in the M-element-rich coating are of a close-packed hexagonal structure; C atoms or N atoms are dissolved in the close-packed hexagonal structure; the prepared MAX-phase coating has a similar crystal structure with a conventional MAX-phase coating; and consequently, the MAX phase forming temperature can be lowered during the annealing process, and then the damage to the substrate can be reduced.

Description

technical field [0001] The invention relates to the technical field of ceramic coatings, in particular to a preparation method of MAX phase coatings. Background technique [0002] In recent years, with the rapid development of nuclear power, aerospace, marine and other related industries, the requirements for anti-oxidation and anti-corrosion properties of structural materials are getting higher and higher. Coating technology is widely used to improve the oxidation resistance and corrosion resistance of structural materials in an economical and convenient way. At present, the surface coating technology is mainly physical vapor deposition method represented by magnetron sputtering and cathodic arc ion plating technology, which deposits various anti-oxidation and anti-corrosion coatings on the surface of different structural materials, such as metals, carbides, and nitrides. And FeCrAl coating etc. [0003] The MAX phase of ternary layered ceramics is a new type of cermet-li...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/35C23C14/06C23C14/58
CPCC23C14/0021C23C14/0635C23C14/0641C23C14/325C23C14/35C23C14/5806
Inventor 王振玉李文涛柯培玲张栋汪爱英
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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