Epitaxially oriented lithium niobate thin film based on pt substrate and its growth method
A lithium niobate and substrate technology, which is applied in the growth field of nanoscale high-quality epitaxially oriented lithium niobate films, can solve the problem that the peeling thickness of the lithium niobate film cannot be prepared, the preparation and application of electrical devices are inconvenient, and the niobate cannot be prepared. Lithium film and other problems, to achieve the effect of facilitating film parameters and structure design, regulating film parameters and structure design, and good crystallinity and epitaxial orientation
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Embodiment 1
[0017] 1) Check whether the laser, vacuum system and electric cabinet control system are operating normally, and place the lithium niobate single crystal target produced by the pulling method on the target holder. Here we choose the Z-direction slice of lithium niobate single crystal with the same composition as Target material, the size is 30mm in diameter and 3mm in thickness;
[0018] 2) Sonicate the Pt(111) substrate rinsed with deionized water for 15-20 minutes using acetone, absolute ethanol, and deionized water in sequence, then dry it with high-purity nitrogen, and then put it in In the growth chamber, turn on the laser self-test, use the mechanical pump and the molecular pump to pump the vacuum of the growth chamber back to 10 -6 Pa, set the program to heat the substrate, the temperature rise rate is 20°C / min, when the substrate is heated to 550°C, feed a certain flow rate (optimally 5 sccm) of oxygen into the growth chamber, and turn off the molecular pump;
[0019]...
Embodiment 2
[0025] 1) Check whether the laser, vacuum system, and electric cabinet control system are operating normally, and place the lithium niobate single crystal target made by the pulling method on the target holder. Here we choose magnesium-doped 6.5mol% lithium niobate single crystal Z A slice is used as a target, and the size is 30 mm in diameter and 3 mm in thickness.
[0026] 2) Sonicate the Pt(111) substrate rinsed with deionized water for 15-20 minutes using acetone, absolute ethanol, and deionized water in sequence, then dry it with high-purity nitrogen, and then put it in In the growth chamber, turn on the laser self-test, use the mechanical pump and the molecular pump to pump the vacuum of the growth chamber back to 10 -6 Pa, set the program to heat the substrate, the temperature rise rate is 20°C / min, when the substrate is heated to 550°C, feed a certain flow rate (optimally 5 sccm) of oxygen into the growth chamber, and turn off the molecular pump;
[0027] 3) After the...
Embodiment 3
[0033] 1) Check whether the laser, vacuum system and electric cabinet control system are operating normally, and place the lithium niobate single crystal target made by the pulling method on the target holder. Here we choose lithium niobate (CLN) single crystal Z with the same composition. The slice is used as the target material, the size is 30mm in diameter and 3mm in thickness;
[0034] 2) Sonicate the Pt(111) substrate rinsed with deionized water for 15-20 minutes using acetone, absolute ethanol, and deionized water in sequence, then dry it with high-purity nitrogen, and then put it in In the growth chamber, turn on the laser self-test, use the mechanical pump and the molecular pump to pump the vacuum of the growth chamber back to 10 -6 Pa, set the program to heat the substrate, the temperature rise rate is 20°C / min, when the substrate is heated to 550°C, feed a certain flow rate (optimally 5 sccm) of oxygen into the growth chamber, and turn off the molecular pump;
[003...
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