A kind of graphene detector and preparation method thereof

A detector and graphene technology, applied in electric radiation detectors, radiation pyrometry, instruments, etc., can solve the problems of low absorption rate and response rate of terahertz radiation by terahertz detectors, and achieve the solution of absorption rate and The effect of low response rate, increased duty cycle, and reduced difficulty of preparation process

Active Publication Date: 2020-11-03
YANTAI RAYTRON TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a graphene detector and a preparation method thereof for the defects in the prior art. The graphene detector of the present invention uses CVD to directly grow graphene as the metamaterial layer of the detector, which solves the problem of traditional The microbolometer-type terahertz detector has a low absorption rate and response rate to terahertz radiation, which optimizes device performance, and the preparation process is simple, avoiding damage to the graphene film during the transfer process

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  • A kind of graphene detector and preparation method thereof
  • A kind of graphene detector and preparation method thereof
  • A kind of graphene detector and preparation method thereof

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Embodiment 1

[0081] Such as Figure 15 As shown, the graphene detector capable of detecting terahertz in the present invention includes a substrate 1, a metal reflective layer 2 formed on the substrate 1, an insulating dielectric layer 3 formed on the metal reflective layer 2 and covering the substrate 1 , a patterned micro-bridge structure disposed on the insulating medium layer 3 and a metamaterial structure disposed on the micro-bridge structure. The metal reflective layer 2 has multiple sections, and the multiple sections of the metal reflective layer 2 are evenly spaced on the substrate 1 , and the micro-bridge structure bridges over the metal reflective layer 2 .

[0082] The microbridge structure includes a first support layer, a heat-sensitive thin film layer 8, a first dielectric protection layer 9, an electrode layer 12, a filling metal layer 13 and a passivation layer 14; the first support layer is supported and arranged on the metal Above the reflective layer 2, the first supp...

Embodiment 2

[0108] The structure of the graphene detector of this embodiment is basically the same as that of Embodiment 1, the difference is that the pixel size of the graphene detector of this embodiment is 16um~70um, and the top view of its metamaterial structure is as follows Figure 18 As shown, the top view of the metamaterial structure is a centrally symmetrical square, and the surface of the square is provided with a plurality of second square holes evenly spaced apart, and the second square holes are arranged to form a "back"-shaped structure, and the The side length of the second square hole is larger than the side length of the first square hole in the first embodiment. Such as Figure 19 It has been shown that a broad spectrum with an absorption rate greater than 60% can be realized in the range of 3 THz to 10 THz by using this metamaterial pattern.

[0109] The graphene detector capable of detecting terahertz in the present invention mainly includes a substrate 1 containing ...

Embodiment 3

[0132] The structure of the graphene detector of this embodiment is basically the same as that of Embodiment 1, the difference is that the pixel size of the graphene detector of this embodiment is 32um~140um, and the top view of its metamaterial structure includes the following three types:

[0133] a'. If Figure 20A As shown, the top view of the metamaterial structure is a centrally symmetrical four-opening resonant ring, the outer frame of the four-opening resonant ring is a square frame with four sides open, and the midpoint of the four sides of the positive direction frame is open, and the square The four corners of the border are respectively connected by diagonal lines;

[0134] b. If Figure 20B As shown, the top view of the metamaterial structure is a plurality of concentric closed rings, and the shape of the closed rings is square or circular;

[0135] c. If Figure 20C As shown, the top view of the metamaterial structure is a square frame structure, the midpoints...

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Abstract

The invention discloses a graphene detector and a preparation method thereof. The detector comprises a substrate, a metal reflective layer, a microbridge structure and a metamaterial structure from bottom to top. The microbridge structure comprises a first support layer, a thermosensitive film layer, an electrode layer and a passivation layer from bottom to top, wherein the thermosensitive film layer is electrically connected to the metal reflective layer through the electrode layer. The metamaterial structure comprises a second support layer, a metal layer, a seed layer and a graphene film layer, wherein the second support layer is disposed on the surface of the passivation layer, the metal layer is formed on the second support layer, the seed layer is formed on the metal layer, and the graphene film layer is grown on the surface of the seed layer. The graphene is directly grown as the metamaterial layer of the graphene detector by CVD so as to significantly improve the optical absorption rate and the response rate of the graphene, and optimize the device performance. The graphene detector has a simple preparation process and avoids damage to the graphene film in the transfer process.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems (MEMS: Micro-electromechanical Systems) process manufacturing in semiconductor technology, and in particular relates to a graphene detector and a preparation method thereof. Background technique [0002] Terahertz (Terahertz) refers to electromagnetic waves with a frequency in the 0.1THz-10THz band, and its frequency is between infrared and millimeter waves. Because the ability of terahertz radiation is relatively low, and most non-polar substances and commonly used dielectric materials absorb less terahertz waves, it has strong penetrability to substances, and has high safety, good orientation and wide bandwidth. Advanced technical characteristics make it widely used in many fields such as material science, imaging technology, biomedicine, broadband communication, and microwave orientation. Terahertz detectors mainly include pyroelectric detectors, diode detectors, Colloid detector...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/20G01J5/00H01L31/09B81C1/00B81B7/02
CPCB81B7/02B81B2201/0207B81C1/00349B81C1/00476B81C2201/0176G01J5/00G01J5/20H01L31/09
Inventor 王鹏王杰孙丰沛陈文礼王宏臣
Owner YANTAI RAYTRON TECH
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