A transfer method of uniform graphene film

Abstract

The invention discloses a method for transferring a uniform graphene film. A silicon wafer with an oxide layer is used as an intermediary transfer substrate, and the graphene film obtained by transfer has better smoothness. At the same time, when graphene is made into a transparent electrode, after graphene / PMMA is transferred to the target substrate together, graphene is placed on the top of PMMA / substrate without removing PMMA, thereby completely avoiding the generation of gaps in graphene. The continuity of the film is better, and the transparent electrode has better uniformity and high conductivity. The invention provides the transfer method of the new graphene film with high electrical conductivity and uniform transparent electrode, which has simple process and low cost.

Description

Technical field [0001] The present invention belongs to the technical field of conductive materials, and more particularly to a metastasis method of uniform graphene film. Background technique [0002] Transparent electrodes with high optical transparency, conductivity, and uniformity are an important part of the touch screen, display, solar cell, and light emitting diode devices. Glosene is a carbonaceous new material that is closely stacked by a single layer or several layers of carbon atoms into a two-dimensional honeycomb structure, wherein between the carbon atoms pass SP. 2 Hybrid bond, each carbon atom forms a strong sigma key with adjacent three carbon atoms, which is very secure, forming a stable hexagonal shape, and has excellent light transmittance, conductivity. These characteristics make graphene an ideal alternative material for the indium tin oxide (ITO) of the conventional transparent electrode material, in particular, successfully grown high-quality single-orient...

AI Technical Summary

Problems solved by technology

However, in the process of removing PMMA, it is inevitable to cause gaps in graphene, which reduce the channels for charge transmission, thus making the surface resistance of graphene non-uniform.

At the same time, according to the experimental results, the size of the surface resistance is proportional to the size of the graphene gap, that is, the larger the gap area, the larger the graphene surface resistance and the smaller the conductivity, which is not enough for transparent electrodes to have high conductivity. required

Similarly, graphene films grown on certain metals by chemical vapor deposition replicate the morphology of metal substrates, and PMMA is used to transfer graphene from these metal substrates, and the uneven microstructure of metal substrates also causes The flatness of graphene is not good, which also has a great impact on the uniformity and conductivity of graphene transparent electrodes