Super-smooth glass optical lens multilevel ion polishing method

Abstract

The invention belongs to the technical field of super-smooth glass optical lens polishing, and particularly relates to a super-smooth glass optical lens multilevel ion polishing method. High-energy inert gas ion (such as Ar+ and Xe+) beams are adopted for rapidly etching and removing a Beilby layer in a sub-surface damage layer of a super-smooth surface, and the surface roughness of the super-smooth surface of glass and oxygen losses of oxide components are inevitably increased after ion beam rapid etching; and in order to lower the roughness of the super-smooth surface after the super-smoothsurface is etched by the high-energy ion beams, the multilevel ion polishing method is adopted, by reducing energy of the ion beams, increasing the concentration of oxygen irons in the ion beams gradually and decreasing the concentration of inert gas ions in the ion beams gradually at the same time, the roughness is lowered, the oxide components of which oxygen is lost are oxidized again, finallythe Beilby layer is removed successfully under the condition that the roughness of the super-smooth surface is changed slightly, main pollutants and defects in the damage layer of the super-smooth surface of the super-smooth surface are greatly reduced, and the optical performance of optical elements is effectively improved.

Description

technical field [0001] The invention belongs to the technical field of ultra-smooth glass lens polishing, and in particular relates to a multi-stage ion polishing method for an ultra-smooth glass lens. Background technique [0002] Ultra-smooth glass lenses (rms≤0.3nm) have important and extensive applications in strong laser systems, laser gyroscopes, extreme ultraviolet lithography, and gravitational wave detection systems. At present, the methods for manufacturing such ultra-smooth glass lenses include traditional classical polishing method, float polishing method, ion beam polishing method, etc. Among them, the ultra-smooth glass surface obtained by traditional classical polishing method has high cost performance, so , has been widely used in industrial production. The disadvantage of classical polishing is that the subsurface damage layer formed during the polishing process is hidden under the surface of the glass lens, and there are residual gas molecules, nitrides, o...

AI Technical Summary

Problems solved by technology

The disadvantage of classical polishing is that the subsurface damage layer formed during the polishing process is hidden under the surface of the glass lens, and there are residual gas molecules, nitrides, oxides and other pollutants and submicron defects in the subsurface damage layer. Most of the pollutants and defects exist in the Bielby layer (Bielby layer) in the subsurface damage layer. The thickness of the Bielby layer formed after classical polishing is generally 0.1 to 1 micron

For example: Ar ion bombardment with too high energy can lead to migration and aggregation of Ar atoms after implantation and infiltration, and then form bulging bubbles under the surface layer; during long-term Ar ion bombardment, the incident angles of different regions of the substrate and ion beams are inconsistent. can lead to uneven etching

To sum up, on the one hand, ion beam etching or bombardment removes some pollutants on the surface of the substrate, which helps to improve the bonding force of the film layer when coating the substrate surface. On the other hand, inappropriate ion etching or bombardment Causes new defects to form which can adversely affect final lens quality

[0005] Studies have shown that for ultra-smooth optical components, low surface roughness and low surface defects are the two core indicators of ultra-smooth surfaces. The increase in surface roughness will directly lead to an increase in the scattering loss of the optical surface, and the defects will directly lead to local surface defects. Abnormal, the optical performance changes suddenly at the location of the defect, resulting in a decrease in the quality of the lens

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