Preparation method of wave-transparent ceramic-base composite material containing silicon-boron-nitrogen interface
A composite material and ceramic-based technology, which is applied in the field of preparation of wave-transmitting ceramic-based composite materials, can solve the problems of too much free silicon and great influence on interface wave-transmitting properties, and achieves excellent dielectric properties, good continuity and uniformity. , the effect of high flexural strength and fracture toughness
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Embodiment 1
[0026] (1) On the surface of the three-dimensional woven quartz fiber preform, use monomethyltrichlorosilane, boron trichloride and ammonia as the precursor, hydrogen as the carrier gas, and argon as the dilution gas, at 750 ° C, 400 Pa Under the condition of chemical vapor deposition for 5h, a fiber preform with an amorphous SiBNC coating is obtained; wherein the thickness of the amorphous SiBNC coating is 800nm; the molar ratio of monomethyltrichlorosilane, boron trichloride, ammonia, and hydrogen is 3:2:6:10;
[0027] (2) heat-treating the fiber preform with the amorphous SiBNC coating obtained in step (1) at 700° C. for 2 h in an ammonia atmosphere to obtain a fiber preform with a SiBN wave-transparent coating;
[0028] (3) The fiber preform with SiBN wave-transparent coating that step (2) obtains is placed in the borazine precursor containing the silicon nitride nanopowder of 100~200nm in the mass fraction 25%, particle diameter at 5MPa Immerse under pressure for 0.5h, a...
Embodiment 2
[0031] (1) On the surface of the 2.5-dimensional woven silicon nitride fiber preform, dimethyltrichlorosilane, boron trichloride and ammonia are used as precursors, hydrogen is used as a carrier gas, and argon is used as a dilution gas. Chemical vapor deposition at 800°C and 600Pa for 8 hours to obtain a fiber preform with an amorphous SiBNC coating; the thickness of the amorphous SiBNC coating is 1000nm; dimethyltrichlorosilane, boron trichloride, ammonia, hydrogen The molar ratio is 2:2:5:5;
[0032] (2) heat-treating the fiber preform with an amorphous SiBNC coating obtained in step (1) at 800° C. for 2 h in an ammonia atmosphere to obtain a fiber preform with a SiBN wave-transparent coating;
[0033] (3) Place the fiber preform with the SiBN wave-transparent coating obtained in step (2) in a borazine precursor containing 35% by mass fraction and a particle size of silicon nitride nanopowder of 100 to 200 nm at 5 MPa Immerse under pressure for 1 hour, and then put it into ...
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