Preparation method of wave-transparent ceramic-base composite material containing silicon-boron-nitrogen interface
A composite material and ceramic-based technology, which is applied in the field of preparation of wave-transmitting ceramic-based composite materials, can solve the problems of too much free silicon and great influence on interface wave-transmitting properties, and achieves excellent dielectric properties, good continuity and uniformity. , the effect of high flexural strength and fracture toughness
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[0025] Example 1
[0026] (1) On the surface of the three-dimensional woven quartz fiber preform, use monomethyltrichlorosilane, boron trichloride and ammonia as precursors, hydrogen as carrier gas, and argon as diluent gas, at 750℃, 400Pa Under the conditions of chemical vapor deposition for 5 hours, a fiber preform with amorphous SiBNC coating was obtained; the thickness of the amorphous SiBNC coating was 800 nm; the molar ratio of monomethyltrichlorosilane, boron trichloride, ammonia, and hydrogen was 3:2:6:10;
[0027] (2) Heat the fiber preform with amorphous SiBNC coating obtained in step (1) at 700°C for 2 hours in an ammonia atmosphere to obtain a fiber preform with SiBN wave-transmitting coating;
[0028] (3) The fiber preform with SiBN wave-transmitting coating obtained in step (2) is placed in a borazine precursor containing 25% mass fraction of silicon nitride nano-powder with a particle size of 100-200 nm at a temperature of 5 MPa Under pressure immersion for 0.5h, the...
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[0030] Example 2
[0031] (1) On the surface of the 2.5-dimensional woven silicon nitride fiber preform, dimethyltrichlorosilane, boron trichloride and ammonia are the precursors, hydrogen is the carrier gas, and argon is the dilution gas. Chemical vapor deposition at 800°C and 600Pa for 8 hours to obtain a fiber preform with amorphous SiBNC coating; the thickness of the amorphous SiBNC coating is 1000nm; dimethyl trichlorosilane, boron trichloride, ammonia, hydrogen The molar ratio of is 2:2:5:5;
[0032] (2) Heat the fiber preform with the amorphous SiBNC coating obtained in step (1) at 800°C for 2 hours in an ammonia atmosphere to obtain the fiber preform with the SiBN wave-transmitting coating;
[0033] (3) The fiber preform with SiBN wave-transmitting coating obtained in step (2) is placed in a borazine precursor containing 35% mass fraction of silicon nitride nano-powder with a particle size of 100-200nm at a temperature of 5MPa Under pressure immersion for 1h, then put it in...
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