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A photothermal detector with improved detection accuracy and preparation method thereof

A detection accuracy and detector technology, applied in the field of detectors, can solve the problems of inability to accurately detect photon absorption and its photothermal conversion efficiency, and achieve the effects of accurate photothermal conversion measurement, convenient use and excellent reflection performance.

Active Publication Date: 2020-09-25
新昌县雷涛机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to solve the problem that the photothermal detectors in the prior art cannot accurately detect the absorption of photons by a fixed area and the photothermal conversion efficiency, the embodiment of this application proposes a photothermal detector with improved detection accuracy and its preparation In the method, the photothermal detector in the embodiment of the present application sets a first nanohole with a fixed area on the heat-sensitive material layer, and the surface layer is covered with a light-shielding layer made of silicon material, and the light-shielding layer is provided with the same thickness as the first nanohole. The second nanohole, so that the light position is controlled in the first nanohole, through the fixed area absorption to achieve the purpose of accurately measuring its photon absorption and photothermal conversion, simple structure, easy to use

Method used

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  • A photothermal detector with improved detection accuracy and preparation method thereof
  • A photothermal detector with improved detection accuracy and preparation method thereof
  • A photothermal detector with improved detection accuracy and preparation method thereof

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Embodiment 1

[0036] The photothermal detector of this embodiment is composed of a base layer 1, a dielectric layer 2, a thermally sensitive material layer 3, and a light blocking layer 5 which are sequentially connected from the bottom to the top. The area of ​​the light blocking layer 5 is not less than the area of ​​the heat-sensitive material layer 3, and the heat-sensitive material layer 3 is made of heat-sensitive material, such as image 3 As shown, the heat sensitive material layer 3 is provided with first nanoholes 31, the first nanoholes 31 are filled with precious metal particles 32, the light blocking layer 5 is made of silicon material, and the light blocking layer 5 is provided with A second nanohole 51 with the same nanohole 31, the first nanohole 31 and the second nanohole 51 are positioned opposite each other up and down, and a first electrode 61 and a second electrode 62 are respectively provided on both sides of the heat sensitive material layer 3 for connecting to the outsi...

Embodiment 2

[0045] Based on the photothermal detector structure disclosed in Embodiment 1, this embodiment also discloses a photothermal detector structure, such as figure 1 with image 3 As shown, on the basis of Example 1, a graphene film layer 4 is also connected between the heat sensitive material layer 3 and the light blocking layer 5, and the distance between the graphene film layer 4 and the upper surface of the noble metal particles 32 is not greater than 100 nm .

[0046] Specifically: the graphene film layer 4 is a two-layer graphene. The graphene film layer 4 of the photothermal detector in this embodiment uses a double-layer graphene film. Graphene is a good saturator and absorber, and the double-layer graphite A resonant cavity can be formed between the olefin films, which makes the light travel longer in the cavity. The single-photon absorption coefficient of the double-layer graphene (about 2.1×10 8 m -1 ) Larger than a single layer graphene (about 6.8×10 7 m -1 ) Absorption co...

Embodiment 3

[0050] A photothermal detector structure disclosed based on embodiment 2, such as figure 2 As shown, this embodiment also discloses a photothermal detector structure. On the basis of Embodiment 2, a gold film 7 is also provided between the base layer 1 and the dielectric layer 2.

[0051] Specifically: the photothermal detector of this embodiment is also provided with a gold film 7 on the lower surface of the base layer 1. The coupling between the gold film 7 and the incident light is used to enhance the absorption of the incident light from the upper and lower levels, so that The light absorption effect of the detector in the embodiment of the application is better.

[0052] Such as Figure 4 As shown in (c), the light absorption spectrum of the photothermal detector of this embodiment after the gold film 7 is added, the absorption of each wavelength band has increased, and in embodiment 2, the absorption rate of the absorption mode of λ=820nm is changed from 66% is increased to...

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Abstract

The invention belongs to the technical field of detectors, and particularly relates to a photothermal detector for improving detection precision and a preparation method thereof. The photothermal detector is composed of a base layer, a dielectric layer, a nano layer and a light blocking layer connected in order from bottom to top. A first nanopore is disposed in the nano layer, the first nanoporeis filled with precious metal particles, a second nanopore the same as the first nanopore is disposed in the light blocking layer, the first nanopore and the second nanopore are vertically opposite toeach other, a first electrode and a second electrode are respectively disposed on the two sides of the nano layer for connecting an external circuit, the nano layer is made of a heat sensitive material, and the light blocking layer is made of a silicon material, which solves the problem that the photothermal detector cannot accurately detect the absorption of photons and the photothermal conversion efficiency of the fixed area. The purpose of accurately measuring the absorption of photos and the photothermal conversion is achieved by the fixed area absorption, the structure is simple and theuse is convenient.

Description

Technical field [0001] The invention belongs to the technical field of detectors, and specifically relates to a photothermal detector with improved detection accuracy and a preparation method thereof. Background technique [0002] At present, photoelectric detectors are mainly divided into two types, photon detectors and photothermal detectors, among which pyroelectric detectors are a very important kind of photothermal detectors, which are widely used in thermal radiation and from visible light to infrared Band laser detection. However, most of the current photothermal detectors have relatively large absorption points, and there is no precise absorption point, so they cannot accurately detect the absorption of photons and the photothermal conversion efficiency of a fixed area. Summary of the invention [0003] In order to solve the problem that the photothermal detector in the prior art cannot accurately detect the absorption of photons and the photothermal conversion efficiency...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/09H01L31/0232H01L31/18
CPCH01L31/02327H01L31/09H01L31/18Y02P70/50
Inventor 刘翡琼
Owner 新昌县雷涛机械有限公司
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