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Resonator

A resonator, resonant cavity technology, applied to resonators. It can solve the problems of the resonant cavity being difficult to handle and limiting the quality factor of the cavity, and achieve the effects of low loss, low surface roughness and high quality factor.

Inactive Publication Date: 2018-12-28
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, the three-dimensional resonant cavity is usually hollowed out on a metal block, and then two hollowed out metal blocks are spliced ​​together or a cover plate is added to the hollowed out metal block to form a three-dimensional resonant cavity. In this way, the resonance The cavity is not easy to handle, and it is easy to generate large microwave loss
The processing accuracy, dielectric loss, and surface roughness of the cavity are limited by the processing technology, which limits the further improvement of the quality factor of the cavity

Method used

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Embodiment approach

[0039] As an embodiment of the present invention, the dielectric is made of one of polymer, ceramic, sapphire and high resistance silicon. Of course, the present invention is not limited thereto, and the substrate 111 can also be made of other suitable dielectric materials.

[0040] Preferably, the metal layer 112 of the composite plate 110 is made of one of aluminum, niobium, indium, and tin. Of course, the present invention is not limited thereto, and the metal layer 112 can also be made of other suitable superconducting metal materials. Preferably, the thickness of the metal layer 112 is 10 nm-10 μm. As an embodiment of the present invention, the metal layer 112 can be deposited on the surface of the substrate 111 by methods such as electroplating, sputtering, evaporation, chemical vapor deposition (MOCVD), pulsed laser deposition, and molecular beam epitaxy (MBE). By depositing a metal layer on the surface of the substrate 111 with less roughness, the surface roughness ca...

Embodiment 1

[0044] figure 1 is a schematic structural diagram of a resonator according to the first embodiment of the present invention. figure 2 is a structural schematic diagram of the composite panel according to the first embodiment of the present invention. image 3 is a schematic structural view of the metal plate according to the first embodiment of the present invention. Figure 4 is an exploded view of the resonator according to the first embodiment of the present invention.

[0045] refer to Figure 1 to Figure 4 As shown, the first embodiment of the present invention proposes a resonator 100 . The resonator includes six side plates spliced ​​to form a cuboid resonant cavity, and each side plate is independent of each other. As an embodiment of the present invention, there are four composite panels 110 and two metal panels 120 among the six side panels. actually need to be set. refer to image 3 As shown, the composite board 110 includes a substrate 111 and a metal layer...

Embodiment 2

[0048] Figure 5 is a schematic structural diagram of a resonator according to a second embodiment of the present invention. Image 6 is an exploded view of a resonator according to a second embodiment of the present invention.

[0049] refer to Figure 5 , Image 6 As shown, the fourth embodiment of the present invention proposes a resonator 100, the resonator 100 includes six side plates 110 spliced ​​to form a cuboid resonant cavity. There are four composite plates 110 and two metal plates 120 among the six side plates 110 . Wherein, every two composite plates 110 are integrally formed to form a double composite plate structure 110A, and the remaining two metal plates 120 are integrally formed to form a double metal plate structure 120A. Two double composite plate structures 110A and one double metal plate structure 120A are spliced ​​to form a cuboid resonant cavity.

[0050] In this embodiment, the resonator 100 has a through hole A distributed on one of the metal pl...

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Abstract

A resonator includes a plurality of side plates spliced together to form a closed resonant cavity, the plurality of side plates including at least one metal plate and at least one composite plate, thecomposite plate including a substrate and a metal layer disposed on a surface of the substrate. Each surface of the resonant cavity of the resonator of the present invention can reach a lower surfaceroughness, and the loss of the cavity surface facing the microwave is small, so that a higher quality factor can be realized on the cavity surface.

Description

technical field [0001] The invention belongs to the field of microwave devices, and in particular relates to a resonator. Background technique [0002] In many fields such as microwaves, superconducting quantum circuits, superconducting quantum computing, etc., resonators are needed, and resonators with high quality factors are required. For example, in the field of superconducting quantum computing, resonators with resonant cavities with high quality factors can be used as qubits or quantum registers. [0003] In the prior art, the three-dimensional resonant cavity is usually hollowed out on a metal block, and then two hollowed out metal blocks are spliced ​​together or a cover plate is added to the hollowed out metal block to form a three-dimensional resonant cavity. In this way, the resonance The cavity is not easy to handle, and it is easy to generate large microwave loss. The processing accuracy, dielectric loss, and surface roughness of the cavity are limited by the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P7/06
CPCH01P7/06
Inventor 孙骏逸熊康林陆晓鸣黄永丹冯加贵武彪丁孙安
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI