Preparation method of vacuum ultraviolet aluminum reflection mirror

Abstract

The invention discloses a preparation method of a vacuum ultraviolet aluminum reflection mirror and belongs to the technical field of optical thin film. The method mainly aims at key factors, influencing optical performance of the aluminum reflection mirror, in the vacuum ultraviolet aluminum reflection mirror, the key factors include aluminum film oxidation and structure defects and absorption loss of a medium protection layer, a physical vapor deposition technology is adopted for coating aluminum film, then a first protection layer is quickly deposited, the first and second layers of deposited thin film are fluoridated, and finally a second protection layer is deposited. Compared with a traditional preparation method of an aluminum reflection mirror, the method has the advantages that the influence of aluminum film oxidation and absorption loss of the medium layer to the optical performance of the vacuum ultraviolet aluminum reflection mirror can be well reduced, the structure compactness of the protection layer is improved, and the environment stability of the vacuum ultraviolet aluminum reflection mirror is improved. The method has the advantages of being high in targeting performance and quality, simple and easy to implement.

Description

technical field [0001] The invention belongs to the field of optical thin films, and in particular relates to a preparation method of a vacuum ultraviolet aluminum reflector. Background technique [0002] In almost all optical systems, mirrors play an extremely important role. Generally, the reflector can be designed with an all-dielectric film system or a combination of a metal film and a dielectric film. The all-dielectric film system is formed by alternately combining two or more thin film materials with small absorption loss and different refractive index. Compared with the all-dielectric mirror, the metal film mirror has the characteristics of simple film system design, wide reflection band, thin film thickness, small mechanical stress, and low wavefront deformation of the device, and the metal film reflects when the light is incident at a large angle. The polarization separation of mirror reflected light is small, and it has excellent spectral polarization maintainin...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: to overcome the problems of surface oxidation of the aluminum film in the existing vacuum coating process and the influence of structural defects and absorption loss of the dielectric protective film layer on the performance of the vacuum ultraviolet aluminum reflector, and quickly deposit it at a low temperature through the physical vapor deposition technology Metal aluminum film and dielectric protective layer, combined with fluorination treatment technology, eliminates the oxide film layer on the surface of the aluminum film, improves the structural characteristics of the dielectric protective layer, reduces the absorption loss of the dielectric protective layer, and significantly improves the spectral characteristics and environmental stability of the vacuum ultraviolet aluminum reflector

Images