CMOS SPAD (Single Photon Avalanche Diode) photoelectric device with deep N well adopting inverse doping distribution
A photoelectric device, reverse doping technology, applied in the direction of electrical components, semiconductor devices, circuits, etc., can solve the problem of band tunneling effect, increase the dark current value of the device, and is not conducive to improving the noise performance of the device, etc.
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[0020] The technical solutions in the embodiments of the present invention will be described clearly and in detail below with reference to the drawings in the embodiments of the present invention. The described embodiments are only some of the embodiments of the invention.
[0021] The technical scheme that the present invention solves the problems of the technologies described above is:
[0022] Such as figure 1 Shown is the structure diagram of the new CMOS SPAD optoelectronic device. It can be seen from the figure that the device is a planar structure composed of P+ / central N well / counter-doped deep N well / P substrate. Among them, the P+ / central N well constitutes the avalanche region of the device (corresponding to region 11 in the figure), and the photogenerated carriers undergo impact ionization in this region and multiply to form a current that can be observed by the naked eye to realize photoelectric conversion. The reverse doping deep N well constitutes the photon ...
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