Integral manufacturing method of terahertz metal-coated hollow-core rectangular waveguide
A metal coating, rectangular waveguide technology, applied in waveguide-type devices, circuits, electrical components, etc., can solve problems such as affecting the transmission performance of terahertz signals, damage to the electroforming copper layer core mold dissolution solution, and low dissolution efficiency.
Active Publication Date: 2020-10-20
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology
However, conventional acidic and alkaline solutions are used for the dissolution of the gold-plated mandrel with an electroformed copper layer. Due to the large aspect ratio of the waveguide and the small size of the cavity, the dissolution efficiency is extremely low. The skin effect depth of the Hertz waveguide, due to its thin thickness, is easily damaged during the actual core mold dissolution process, and the outer electroformed copper layer is also easily damaged by the core mold dissolution solution. In addition, the thickness of the metal workpiece and the fineness The inconsistency of the surface accuracy of the waveguide cavity caused by the method of electrolytic wire cutting to control the size of the end face of the mandrel will affect the transmission performance of the terahertz signal
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[0031] figure 1 In the schematic diagram of fine electrolytic wire cutting on the left and right cutting surfaces of the rectangular sacrificial mandrel shown, (a) is a three-dimensional schematic diagram of the cutting of the rectangular sacrificial mandrel, and (b) is a two-dimensional schematic diagram of the cutting of the mandrel;
[0032] figure 2 In the schematic diagram of fine electrolytic wire cutting on the upper and lower cutting surfaces of the rectangular sacrificial mandrel, (a) is a three-dimensional schematic diagram of the cutting of the rectangular sacrificial mandrel, and (b) is a two-dimensional schematic diagram of the cutting of the mandrel;
[0033] image 3 In the schematic diagram of the electroplated gold layer on the surface of the rectangular sacrificial mandrel shown, (a) is the rectangular sacrificial mandrel coated with insulating glue at the front end, (b) the rectangular sacrificial mandrel after electroplating the gold layer;
[0034] Fi...
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The invention relates to an integral manufacturing method of a terahertz metal coating hollow-core rectangular waveguide, and belongs to the field of precision micro electrochemical manufacturing. Theintegral manufacturing method is characterized by comprising the steps of carrying out micro electrolytic line cutting machining on a thick metal flat workpiece to obtain cutting surfaces of a rectangular sacrificial core die; electroplating a gold layer with the thickness being of a tens-of-microns magnitude on the surface of the rectangular sacrificial core die; rapidly dissolving the core dieby using a selective etching agent to obtain a rectangular pure gold cavity; electroforming a protective layer outside the rectangular pure gold cavity, and preparing a terahertz meta locating hollow-core rectangular waveguide with the external contour shape required by the assembly through leveling and finishing. The integral manufacturing method can realize efficient, precise and integral manufacturing of the terahertz band metal coating hollow-core rectangular waveguide and has important significance.
Description
technical field [0001] The invention relates to a method for integrally manufacturing a terahertz metal-coated hollow rectangular waveguide, which belongs to the field of precision micro-electrochemical manufacturing. Background technique [0002] As the only spectrum resource that has not been fully developed and utilized in electromagnetic waves, terahertz waves have great application potential in high-speed wireless communications, radar, medical imaging, security inspection, electronic countermeasures and other fields, and are of great importance to promoting national economic development and strengthening national security. strategic significance. The terahertz metal rectangular waveguide is an important transmission device in the terahertz low frequency band. With its advantages of low loss, good flexibility and high safety, its precision manufacturing has become one of the frontiers and hotspots of terahertz science and technology research. [0003] Due to the transm...
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IPC IPC(8): H01P11/00
CPCH01P11/002
Inventor 曾永彬毕晓磊戴兴达曲宁松
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS