Titanium-dioxide nanorod array film and preparation method thereof
A nanorod array, titanium dioxide technology, applied in titanium dioxide, chemical instruments and methods, titanium oxide/hydroxide and other directions, can solve the problems of surface orientation disorder, instability, poor uniformity of porous titanium dioxide film, etc. Defect reduction effect
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Embodiment 1
[0039] The preparation method of the titanium dioxide nanorod array film of the present invention comprises the following steps:
[0040] (1) Use FTO conductive glass of 15×15×2.2mm as the substrate, ultrasonically clean it with detergent, acetone, isopropanol and deionized water, and dry it for later use; take the titanium target with a purity of 99.99wt%, and the titanium target The size is Φ50×4mm.
[0041](2) Put the titanium target and FTO conductive glass into the magnetron sputtering chamber, and wait until the background vacuum reaches 10 -4 At Pa, 99.99% argon gas is introduced at room temperature, the target base distance is adjusted to 60 mm, and the argon gas flow rate is controlled to be 30 sccm under a pressure of 1.0 Pa, the sputtering power is 100 W, and the sputtering is 10 min, and a thin film deposited with titanium metal is obtained. FTO conductive glass.
[0042] (3) Put the conductive glass deposited with a metal titanium film into absolute ethanol for ...
Embodiment 2
[0051] The preparation method of the titanium dioxide nanorod array film of the present invention comprises the following steps:
[0052] (1) Use FTO conductive glass of 15×15×2.2mm as the substrate, ultrasonically clean it with detergent, acetone, isopropanol and deionized water, and dry it for later use; take the titanium target with a purity of 99.99wt%, and the titanium target The size is Φ50×4mm.
[0053] (2) Put the titanium target and FTO conductive glass into the magnetron sputtering chamber, and wait until the background vacuum reaches 10 -4 At Pa, 99.99% argon gas is introduced at room temperature, the target base distance is adjusted to 70 mm, and at a pressure of 1.0 Pa, the argon gas flow rate is controlled to be 30 sccm, the sputtering power is 125 W, and the sputtering is 10 min to obtain a deposited metal titanium film. FTO conductive glass.
[0054] (3) Put the conductive glass deposited with a metal titanium film into absolute ethanol for 20 minutes, and th...
Embodiment 3
[0063] The preparation method of the titanium dioxide nanorod array film of the present invention comprises the following steps:
[0064] (1) Use FTO conductive glass of 15×15×2.2mm as the substrate, ultrasonically clean it with detergent, acetone, isopropanol and deionized water, and dry it for later use; take the titanium target with a purity of 99.99wt%, and the titanium target The size is Φ50×4mm.
[0065] (2) Put the titanium target and FTO conductive glass into the magnetron sputtering chamber, and wait until the background vacuum reaches 10 -4 At Pa, 99.99% argon gas was introduced at room temperature, the distance between the target and the base was adjusted to 80 mm, and at a pressure of 1.0 Pa, the argon gas flow rate was controlled to be 30 sccm, the sputtering power was 140 W, and the sputtering was 20 min to obtain a titanium film deposited on it. FTO conductive glass.
[0066] (3) Put the conductive glass deposited with a metal titanium film into absolute ethan...
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