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High-precision patterned stretchable electrode and preparation method thereof

A patterned electrode, patterned technology, applied in cable/conductor manufacturing, circuits, electrical components, etc., can solve the problems of reduced contact area, affected signal fidelity, low device integration, etc., to achieve good conductivity and cost. The effect of low cost and simple preparation method

Active Publication Date: 2019-05-24
NORTHEAST NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has some disadvantages. On the one hand, the device integration is low; on the other hand, due to the non-coplanar design of the island bridge structure, the contact area of ​​electronic products such as skin-fitting products will be reduced, which will affect the fidelity of the signal.

Method used

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  • High-precision patterned stretchable electrode and preparation method thereof
  • High-precision patterned stretchable electrode and preparation method thereof
  • High-precision patterned stretchable electrode and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059] Example 1. Preparation of high-precision stretchable electrodes based on photolithographic patterning

[0060] according to figure 1 The flow diagram shown in the figure prepares flexible and high-precision patterned stretchable electrodes, and the steps are as follows:

[0061] Firstly, use photolithography to photoetch the electrode pattern on the substrate, then vapor-deposit the gold electrode, then modify it with mercaptoethylamine, and then spray the carbon nanotubes. Polydimethylsiloxane PDMS is spin-coated on the chemical electrode, and after polydimethylsiloxane PDMS is cured, the high-precision pattern electrode and polydimethylsiloxane PDMS are transferred from the substrate together; the specific Proceed as follows:

[0062] 1. Cleaning of silicon substrate: Clean the cut silicon wafer in absolute ethanol and secondary deionized water in turn, and then dry it with nitrogen.

[0063] 2. Octadecyltrichlorosilane (OTS) modifies the surface of the silicon sub...

Embodiment 2

[0082] Example 2. Preparation of high-precision patterned stretchable electrodes with and without mercaptoethylamine modification based on photolithographic patterning. The steps are as follows:

[0083] 1. Preparation of high-precision patterned stretchable electrodes modified with mercaptoethylamine, the steps are as follows:

[0084] 1. Cleaning of silicon substrate: Clean the cut silicon wafer in absolute ethanol and secondary deionized water in turn, and then dry it with nitrogen.

[0085] 2. Octadecyltrichlorosilane (OTS) modifies the surface of the silicon substrate, and the specific steps are as follows: (1) the surface of the silicon chip is hydroxylated: the silicon chip after step 1 is treated in the piranha washing solution (volume ratio (7:3 mixed solution of concentrated sulfuric acid and hydrogen peroxide, specifically 35mL of concentrated sulfuric acid and 15mL of hydrogen peroxide) soaked for 30min, then took out the silicon wafer, and rinsed the substrate wit...

Embodiment 3

[0123] Example 3. Preparation of high-precision stretchable electrodes with different line widths based on photolithographic patterning

[0124] First, use photolithography to photoetch different high-precision line patterns on the substrate, then evaporate gold electrodes, then perform mercaptoethylamine modification, and then spray carbon nanotubes to obtain high-precision Au / SWCNTs patterned electrodes , and then spin-coat polydimethylsiloxane PDMS on the patterned electrode, after the polydimethylsiloxane PDMS is cured, the high-precision pattern electrode and polydimethylsiloxane PDMS are transferred from the substrate together down; the specific steps are as follows:

[0125] 1. Cleaning of silicon substrate: Clean the cut silicon wafer in absolute ethanol and secondary deionized water in turn, and then dry it with nitrogen.

[0126] 2. Octadecyltrichlorosilane (OTS) modifies the surface of the silicon substrate, and the specific steps are as follows: (1) the surface of...

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Abstract

The invention discloses a high-precision patterned stretchable electrode and a preparation method thereof. The high-precision patterned stretchable electrode is a patterned electrode attached to an elastic substrate. The patterned electrode is a metal electrode connected with a carbon nano tube. The metal electrode is a gold electrode. The metal electrode is connected with the carbon nano tube through mercaptoethylamine. The high-precision patterned stretchable electrode is prepared by the method provided in the invention. The method comprises the following steps: evaporating metal on a substrate provided with an electrode pattern to obtain a metal electrode; spraying a carbon nano tube on the surface of the metal electrode; preparing an elastic substrate on the surface of the carbon nanotube, and stripping the elastic substrate from the substrate. According to the patterned stretchable electrode provided by the invention, the advantages of high conductivity of a traditional gold electrode and high aspect ratio and large specific surface area of a carbon nano tube are combined. The advantage complementation is fully realized, and the high-precision patterned stretchable electrodewith high tensile property and good conductivity is prepared.

Description

technical field [0001] The invention relates to an electrode and a preparation method thereof, in particular to a high-precision patterned stretchable electrode and a preparation method thereof, belonging to the field of electrode preparation. Background technique [0002] With the rapid development of new-generation electronic devices such as elastic bionic electronic skin, wearable smart devices, and flexible smart display products, stretchable conductive materials have attracted much attention from researchers. At present, there are many kinds of stretchable conductive materials, which are mainly divided into metals, conductive polymers, carbon materials, etc., and they show great application prospects in the future. For example: using structured gold films, silver nanowires, conductive polymers, carbon nanotubes, graphene and other conductive materials, stretchable stress, pressure, temperature, multifunctional sensors, and stretchable lithium ion sensors have been reali...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B5/14H01B1/02H01B1/04H01B13/00
Inventor 赵晓丽汤庆鑫童艳红杨硕孙子晶
Owner NORTHEAST NORMAL UNIVERSITY
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