Multi-cavity coupled enhanced nano plasma laser array and preparation method thereof

A laser array and plasma technology, applied in the optical field, can solve problems such as low output optical power, limited laser quality factor, high loss, etc., and achieve the effect of increasing the output optical power, reducing the threshold, and achieving high density

Active Publication Date: 2019-05-31
BEIJING UNIV OF TECH
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Problems solved by technology

However, the structure of nanoplasmonic lasers has the problem of high loss caused by metals, which limits the quality factor of the l

Method used

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  • Multi-cavity coupled enhanced nano plasma laser array and preparation method thereof
  • Multi-cavity coupled enhanced nano plasma laser array and preparation method thereof
  • Multi-cavity coupled enhanced nano plasma laser array and preparation method thereof

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Embodiment 1

[0044] This embodiment provides a multi-cavity coupled-enhanced nanoplasmonic laser array with a lasing wavelength of 1500 nm, the structure of which is as follows figure 1 As shown, the specific materials, parameters and dimensions are as follows:

[0045] The semiconductor substrate (1) is an indium phosphide (InP) substrate;

[0046] The structure of the semiconductor gain cavity (2) is a quantum well composed of indium gallium arsenide phosphide (InGaAsP) 202 / 203 in different proportions, the surface shape is a square, and its side length W is 320nm;

[0047] The insulating dielectric layer (3) is silicon dioxide (SiO 2 ) film 206, the thickness of which is 20nm;

[0048] The metal (4) wrapping the resonant cavity is Ti(5nm) / Ag(200nm);

[0049] The distance D(5) between the adjacent resonant cavities is 50nm.

[0050] In this embodiment, Lumerical FDTD Solutions is used to establish a corresponding model to simulate the coupling enhancement effect between the two resonat...

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Abstract

A multi-cavity coupled enhanced nano plasma laser array and a preparation method thereof belong to the field of optical technology. The multi-cavity coupled enhanced nano plasma laser array comprisesa semiconductor substrate, semiconductor gain resonant cavities, an insulating dielectric layer (3), and a metal wrapping layer, wherein an semiconductor gain resonant cavity array is disposed on thesemiconductor substrate, that is, the insulating dielectric layer is disposed on the surfaces of the semiconductor substrate and the semiconductor gain resonant cavity array, and wraps each semiconductor gain resonant cavity; the insulating dielectric layer also maintains the pattern of the semiconductor gain resonant cavity array, namely forms a semiconductor gain resonant cavity-insulating dielectric layer array; and the metal wrapping layer is disposed on the insulating dielectric layer and also fills an array pattern on the insulating dielectric layer. The surface plasma modes (evanescentwave) between adjacent resonant cavities can be coupled to each other, thereby improving the performance of the nano laser and realizing the ultra-high density plasma laser area array output.

Description

technical field [0001] The invention relates to a nano-laser array and preparation thereof, in particular to a multi-cavity coupling-enhanced nano-plasma laser array and a preparation method thereof, belonging to the technical field of optics. Mainly used in optoelectronic integration, optical communication, optical information storage, optical microscopy, super-resolution and other fields. Background technique [0002] Surface plasmon provides a way to process light at the nanoscale, that is, the light wave is resonantly coupled with the free electrons on the metal surface to generate near-field electromagnetic waves propagating along the metal surface. It has strong optical field confinement ability, It is one of the most effective ways to overcome the optical diffraction limit and achieve localized electromagnetic field enhancement. Surface plasmon-based nanolasers amplify surface plasmons through gain materials around the medium and resonate in nanoscale resonators to g...

Claims

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Application Information

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IPC IPC(8): H01S5/022H01S5/40H01S5/30H01S5/10H01S5/04H01S5/042
Inventor 关宝璐张成龙杨悦吴宇辰
Owner BEIJING UNIV OF TECH
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