Multi-cavity coupled enhanced nano plasma laser array and preparation method thereof

Abstract

A multi-cavity coupled enhanced nano plasma laser array and a preparation method thereof belong to the field of optical technology. The multi-cavity coupled enhanced nano plasma laser array comprisesa semiconductor substrate, semiconductor gain resonant cavities, an insulating dielectric layer (3), and a metal wrapping layer, wherein an semiconductor gain resonant cavity array is disposed on thesemiconductor substrate, that is, the insulating dielectric layer is disposed on the surfaces of the semiconductor substrate and the semiconductor gain resonant cavity array, and wraps each semiconductor gain resonant cavity; the insulating dielectric layer also maintains the pattern of the semiconductor gain resonant cavity array, namely forms a semiconductor gain resonant cavity-insulating dielectric layer array; and the metal wrapping layer is disposed on the insulating dielectric layer and also fills an array pattern on the insulating dielectric layer. The surface plasma modes (evanescentwave) between adjacent resonant cavities can be coupled to each other, thereby improving the performance of the nano laser and realizing the ultra-high density plasma laser area array output.

Description

technical field [0001] The invention relates to a nano-laser array and preparation thereof, in particular to a multi-cavity coupling-enhanced nano-plasma laser array and a preparation method thereof, belonging to the technical field of optics. Mainly used in optoelectronic integration, optical communication, optical information storage, optical microscopy, super-resolution and other fields. Background technique [0002] Surface plasmon provides a way to process light at the nanoscale, that is, the light wave is resonantly coupled with the free electrons on the metal surface to generate near-field electromagnetic waves propagating along the metal surface. It has strong optical field confinement ability, It is one of the most effective ways to overcome the optical diffraction limit and achieve localized electromagnetic field enhancement. Surface plasmon-based nanolasers amplify surface plasmons through gain materials around the medium and resonate in nanoscale resonators to g...

AI Technical Summary

Problems solved by technology

However, the structure of nanoplasmonic lasers has the problem of high loss caused by metals, which limits the quality factor of the laser, resulting in a high threshold of the laser, and the output optical power of a single nanolaser is low, only at the nanowatt level

Images