Composite abrasive particle polishing solution and preparation method thereof
A technology of composite abrasive grains and polishing liquid, which is applied in the fields of surface treatment and chemical mechanical polishing, can solve the problems that the polishing rate and polishing effect of hard materials need to be improved, so as to improve the service life and scope of application, not easy to break, and operability strong effect
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Embodiment 1
[0039] (1) Take 10mL of polystyrene microsphere emulsion with a concentration of 12g / L, add 250mL of deionized water, ultrasonically disperse at 40KHz frequency, add 0.002mol of cerium nitrate hexahydrate and 0.001mol of hexamethylenetetramine to obtain a mixture Solution; react the configured mixed solution in a magnetic stirrer at 85°C for 3 hours to obtain a composite abrasive solution containing cerium oxide;
[0040] (2) Add 125ml of nanodiamond suspension with a concentration of about 0.002g / mL to the above solution, stir evenly to obtain a reaction solution; react the configured reaction solution in a magnetic stirrer at 25°C for 3 hours to obtain a mixture; Carry out centrifugation and washing, specifically using the relative centrifugal force RCF to carry out centrifugation treatment in the range of 70×g to 7690×g, using deionized water, absolute ethanol, and deionized water in order to add pure liquid phase for washing, through the washing process Remove the polystyrene...
Embodiment 2
[0044] (1) Take 10mL of polystyrene microsphere emulsion with a concentration of 12g / L, add 250mL of deionized water, disperse ultrasonically at a frequency of 40KHz, add 100ml of polycrystalline diamond suspension with a concentration of about 0.005g / mL, water bath at 25℃ Heat for 3 hours to obtain a composite abrasive solution containing polycrystalline diamond;
[0045] (2) Add 0.004 mol of cerium nitrate hexahydrate and 0.002 mol of potassium hydroxide to the above-obtained solution, continue heating at 85°C in a water bath for 1.5 hours, centrifuge and wash the mixture, specifically using a relative centrifugal force RCF of 70×g to 7690 ×g for centrifugation, using deionized water, absolute ethanol, and deionized water in order to add pure liquid phase for washing. Through this washing process, the polystyrene microspheres, soft abrasive particles, and hard grinding particles that are not involved in the composite are removed To improve the purity of the composite abrasive p...
Embodiment 3
[0049] (1) Take 10mL polystyrene microsphere emulsion with a concentration of 12g / L, add 250mL deionized water, ultrasonically disperse at 40KHz frequency, add 0.02mol water glass and 0.001mol sodium hydroxide, stir to dissolve, add concentration about 200ml of a 0.002g / mL cubic boron nitride suspension, stir it evenly to obtain a reaction solution;
[0050] (2) Heat the above reaction solution in a common water bath at 80°C for 1.5 hours, centrifuge and wash the mixture, specifically using a relative centrifugal force RCF of 70×g to 7690×g for centrifugation, using deionized water, absolute ethanol, Deionized water is added to the pure liquid phase for washing. The washing process removes the polystyrene microspheres, soft abrasive particles, and hard abrasive particles that are not involved in the compounding to improve the purity of the composite abrasive particles. After washing, it is removed by centrifugation In the liquid phase, composite abrasive grains containing silicon...
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