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A grid used in a grid-controlled pulse traveling wave tube electron gun and its manufacturing process

A technology of gate-controlled pulse and manufacturing process, which is applied in the direction of electron/ion gun and non-luminescent electrode manufacturing of time-of-flight electron tubes, and can solve the problem of reducing the working reliability and service life of grid-controlled pulse traveling wave tubes The normal operation of the tube, the reduction of the work function of the grid surface, etc., to improve the reliability and service life of the work, the stability of the repeatability, and the effect of reducing the thermal stress

Active Publication Date: 2021-06-01
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At the same time, because the distance between the cathode and the grid is very small, usually less than 1mm, when the cathode is working, the emitter evaporated from the cathode is easy to deposit on the grid, which will reduce the work function of the grid surface
The increase of the grid current will destroy the normal operation of the TWT, and in severe cases, the entire system will fail, thus greatly reducing the reliability and service life of the grid-controlled pulse TWT

Method used

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  • A grid used in a grid-controlled pulse traveling wave tube electron gun and its manufacturing process
  • A grid used in a grid-controlled pulse traveling wave tube electron gun and its manufacturing process

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Embodiment 1

[0026] Such as figure 1 As shown, the grid of the present invention is used in the grid-controlled pulsed traveling wave tube electron gun to suppress the grid electron emission of the grid-controlled pulsed traveling wave tube. The substrate is cleaned and degassed in high temperature vacuum; the ion beam assisted deposition method is used to ion implant Nb and deposit Nb thin film on the molybdenum grid substrate, the ion beam (Ar+) energy is 850eV, and the background vacuum is better than 1×10 -4 Pa, the working pressure is 2.4×10 -2 Pa, to prepare a gradient functional layer, the thickness of the gradient functional layer is 1.1um; the ion beam assisted deposition method is used to implant Hf and deposit Hf coating on the Nb film layer, and then deposit C coating on it, ion beam (Ar+ ) energy is 800eV, the background vacuum is better than 1×10 -4 Pa, the working pressure is 5×10 -1 Pa, prepare the Hf / C composite anti-grid electron emission film layer, the thickness of t...

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Abstract

The invention discloses a grid used in a grid-controlled pulse traveling wave tube electron gun and a manufacturing process thereof. The grid includes a grid substrate made of molybdenum, a gradient functional layer formed on the grid substrate, and a composite anti-grid electron emission film formed on the gradient functional layer; wherein the gradient functional layer is made of Nb or Ta, and the composite The anti-grid electron emission film is made of high melting point material with a work function greater than 4eV. The manufacturing process includes the following steps: (1) degassing the formed molybdenum grid substrate at 700-1000°C in high-temperature vacuum; (2) preparing a gradient function on the grid substrate by ion implantation and vacuum deposition coating method (3) Prepare a composite anti-grid electron emission film on the gradient functional layer by ion implantation and vacuum deposition coating method; (4) Perform high-temperature heat treatment on the prepared grid. The grid net of the invention can suppress the grid electron emission of the grid-controlled pulse traveling wave tube, and improve the working reliability and service life of the grid-controlled pulse traveling wave tube.

Description

technical field [0001] The invention relates to a grid used in a grid-controlled pulse traveling wave tube electron gun and a manufacturing process thereof, belonging to the field of microwave electric vacuum technology. Background technique [0002] Due to a series of advantages such as high gain, high power, wide operating frequency band, small size, light weight, and good reliability, the grid-controlled pulse traveling wave tube has become an ideal choice for satellite communications, missile guidance, radar reconnaissance, remote sensing and telemetry, electronic countermeasures, and Key components in spaceship positioning, docking and other equipment play an important role in the field of national defense and aerospace. [0003] When the gate-controlled pulse traveling wave tube is working, since the operating temperature of the cathode is as high as 1000-1050°C, it is necessary to use a high-temperature-resistant metal material as the grid. At present, molybdenum (Mo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J23/06H01J9/14
CPCH01J9/14H01J23/06
Inventor 吕琴丽李帅王树茂
Owner GRIMAT ENG INST CO LTD
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