Chlorosilane high-boiling residue recovery technology combining slurry treatment with pyrolysis reaction

A technology of cracking reaction and chlorosilane, which is applied in the direction of silicon compound, halosilane, chemical recovery, etc., can solve the problems of increased production cost, catalyst deactivation, high boiling material cracking rate cannot be improved, etc., to avoid accumulation and prolong use The effect of longevity
CN110078080AActive Publication Date: 2019-08-02TIANJIN UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
TIANJIN UNIVERSITY OF SCIENCE AND TECHNOLOGY
Publication Date
2019-08-02

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Abstract

The invention relates to a chlorosilane high-boiling residue recovery technology combining slurry treatment with pyrolysis reaction. The technology comprises the following steps: pre-treating chlorosilane high-boiling residue slurry through a slurry treatment device, separating recycled materials, feeding a chlorosilane low polymer into a pyrolysis reactor loaded with a catalyst to react with hydrogen chloride to obtain a pyrolysis product, and performing subsequent separation to obtain a monosilane product. The chlorosilane high-boiling residue recovery technology combining the slurry treatment with the pyrolysis reaction has the advantages that the slurry treatment device can effectively remove solid impurities, such as metal chloride and the like, contained in the materials, and inactivation and coking phenomena of a pyrolysis catalyst are avoided; a high-boiling residue separation tower has a function of beside collection, and can separate liquid-phase high polymers, so that accumulation is avoided; a pyrolysis reaction rectifying tower performs pyrolysis reaction and separation process at the same time, so that the pyrolysis ratio can be improved.
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Description

Technical field

[0001] The invention relates to the field of chlorosilane production, in particular to a chlorosilane high-boiling material recovery process combining slurry treatment and cracking reaction. Background technique

[0002] At present, the domestic polysilicon production process mainly adopts the modified Siemens method, and its process mainly includes: trichlorosilane preparation process, trichlorosilane refining process, trichlorosilane reduction process and reduction recovery process. Due to the constraints of the purity of silicon powder raw materials, catalysts and process conditions, a small amount of Si-C, Si-Si, Si-C-Si, Si-C-Si, Si-C, Si-Si, Si-C-Si, Si-O-Si bond compounds and high boilers composed of residual silicon powder, catalyst and metal chloride. High boiling material is a sauce-colored, pungent odor and strong corrosive mixed liquid. It is flammable, explosive and not easy to store. In addition, the market capacity is limited. If it is not processe...

Claims

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