Flexible brain-computer interface electrode with enhancement-type wrinkle micro-structure and preparation method
A brain-computer interface and microstructure technology, applied in the field of biomedical engineering, can solve problems such as difficult to achieve specific surface area, difficult to obtain specific surface area, low wrinkle amplitude, etc. Improved effect
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Embodiment 1
[0059] Such as figure 1 As shown, this embodiment provides a schematic diagram of a preferred structure of a flexible brain-computer interface electrode with an enhanced wrinkled microstructure, wherein the electrode is composed of an elastic polymer substrate 1, a bottom polymer insulating layer 2, a metal electrode layer 3, and a top layer of polymer The encapsulation layer 4 and the electrode modification layer 5 are composed of five parts.
[0060] The elastic polymer base 1 is formed by setting a layer of elastic polymer film above the base, and silicone oil is mixed into the elastic polymer film, and the mass percentage of the silicone oil added is 30% of the total mass of the elastic polymer film and the silicone oil. A first layer of polymer film is deposited on the elastic polymer substrate 1, and the first layer of polymer film is used as the underlying polymer insulating layer 2 to obtain a uniformly distributed micro-scale wrinkled structure, compared with the elas...
Embodiment 2
[0080] This embodiment provides a method for preparing a flexible brain-computer interface electrode with an enhanced wrinkled microstructure, such as figure 2 As shown, it is a schematic diagram of the formation of enhanced wrinkled microstructure. By adding silicone oil to uncured PDMS or Ecoflex, and then extracting with isopropanol, in-plane shrinkage will occur in the elastic polymer substrate 1, and the first layer is deposited. When the stress is released in the polymer film, an enhanced wrinkled morphology is produced. The material of the first polymer film is Parylene C.
[0081] Such as image 3As shown in (a)-(j), it is the preparation method of the above-mentioned flexible brain-computer interface electrode with enhanced folded microstructure, which is prepared according to the following steps:
[0082] 1), such as image 3 Shown in (a), on the 500 micron thick silicon chip, thermally evaporate the aluminum metal release layer of 300 nanometer thickness;
[00...
Embodiment 3
[0096] In this example, a method for preparing a flexible brain-computer interface electrode with enhanced wrinkled microstructure is provided. The specific implementation steps are the same as in Example 2, except that in step 2), the elastic polymer substrate 1 used It is Ecoflex, which is an ultra-soft silica gel with a modulus of 60kPa. By depositing Parylene C on its surface, a completely different wrinkle morphology can be obtained from the PDMS elastic polymer substrate 1.
[0097] Such as Figure 5 As shown, the electrode with enhanced wrinkled microstructure prepared by the above method was compared (such as Figure 5 Shown in (b)) and the electrode prepared by depositing Parylene C on Ecoflex without silicone oil pretreatment (not mixed with silicone oil) (such as Figure 5 As shown in (a)), it can be seen that there are almost no obvious wrinkles on the Ecoflex elastic polymer substrate 1 without silicone oil pretreatment, and the maximum amplitude is 0.05 μm, whil...
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Abstract
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