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Multifunctional acoustic surface wave sensor and preparation method and application thereof

A surface acoustic wave and sensor technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. It can solve the problems of complex operation process and long cycle.

Active Publication Date: 2019-09-06
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the standard detection method for Staphylococcus aureus is mainly microbial culture method, but it needs steps such as bacteria enrichment, separation, biochemical identification, etc., and the detection time is usually more than 4 days, such as polymerase chain reaction (Real-timepolymerase chain reaction, Real-time PCR) quantitative method, mainly to extract the DNA of the biological sample to be tested, the cycle is long, and the operation process is very complicated

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  • Multifunctional acoustic surface wave sensor and preparation method and application thereof
  • Multifunctional acoustic surface wave sensor and preparation method and application thereof
  • Multifunctional acoustic surface wave sensor and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] A preparation method of a multifunctional surface acoustic wave sensor, the steps are as follows:

[0024] S1. Preparation of SAW chip: select a piezoelectric substrate, and prepare interdigitated electrodes on the piezoelectric substrate through a photolithography micromachining process;

[0025] S2. Deposit ZnO thin film: on the surface of the SAW chip, deposit a nano-particle ZnO thin film with a size of 25-45nm by magnetron sputtering; Control the difference of sputtering parameters to control the morphology of the ZnO thin film deposited on the surface of the SAW chip. Sputtering, magnetron sputtering deposition ZnO thin film is deposited in two layers, after the first layer is deposited, wait for the temperature to drop to 65°C, and start the second layer deposition; the deposition parameters of the first layer are: the coating vacuum is 0.5Pa, the sputtering The sputtering power is 50W, and the sputtering time is 60min; the deposition parameters of the second la...

Embodiment 2

[0035] A preparation method of a multifunctional surface acoustic wave sensor, the steps are as follows:

[0036] S1. Preparation of SAW chip: select a piezoelectric substrate, and prepare interdigitated electrodes on the piezoelectric substrate through a photolithography micromachining process;

[0037] S2. Deposit ZnO thin film: on the surface of the SAW chip, deposit a nano-particle ZnO thin film with a size of 25-45nm by magnetron sputtering; Control the difference of sputtering parameters to control the morphology of the ZnO thin film deposited on the surface of the SAW chip. Sputtering, magnetron sputtering deposition ZnO thin film is deposited in two layers, after the first layer is deposited, wait until the temperature drops to 50°C, and start the second layer deposition; the deposition parameters of the first layer are: the coating vacuum is 0.4Pa, the sputtering The sputtering power is 40W, and the sputtering time is 70min; the deposition parameters of the second la...

Embodiment 3

[0045] A preparation method of a multifunctional surface acoustic wave sensor, the steps are as follows:

[0046] S1. Preparation of SAW chip: select a piezoelectric substrate, and prepare interdigitated electrodes on the piezoelectric substrate through a photolithography micromachining process;

[0047] S2. Deposit ZnO thin film: on the surface of the SAW chip, deposit a nano-particle ZnO thin film with a size of 25-45nm by magnetron sputtering; Control the difference of sputtering parameters to control the morphology of the ZnO thin film deposited on the surface of the SAW chip. Sputtering, magnetron sputtering deposition ZnO thin film is deposited in two layers, after the first layer is deposited, the temperature drops to 80°C, and the second layer deposition starts; the deposition parameters of the first layer are: the coating vacuum is 0.6Pa, the sputtering The sputtering power is 60W, and the sputtering time is 50min; the deposition parameters of the second layer are: t...

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Abstract

Provided in the invention is a method for preparing a multifunctional acoustic surface wave sensor. The method comprises steps: S1, preparing an SAW chip; S2, depositing a ZnO thin film; to be specific, depositing a nano-particle-shaped ZnO thin film with the size of 25 to 45 nm on the surface of the SAW chip by means of magnetron sputtering; and S3, carrying out PDMS packaging; to be specific, preparing a PDMS package block, opening a through hole in the center of the PDMS package block by using a drilling tool, enabling the PDMS package block to be in contact with the ZnO thin film, aligningthe through hole of the PDMS package block at a delay line area of the SAW chip, and realizing bonding of the PDMS package block and the ZnO film under the high vacuum pressure to obtain a multifunctional acoustic surface wave sensor. The preparation method is simple; the sensitive layer and the waveguide layer are protected from being polluted in the preparation process; and the prepared acoustic surface wave sensor is capable of carrying out real-time on-site high-precision monitoring on various various living microorganisms in a liquid phase environment.

Description

technical field [0001] The invention relates to a multifunctional surface acoustic wave sensor and a preparation method thereof, belonging to the technical field of surface acoustic wave sensors. Background technique [0002] Surface Acoustic Wave (SAW) sensor, as a new type of detection technology, has the advantages of microquantization, high sensitivity, fast response speed, and low detection limit, and has become a research hotspot in related fields in the academic circle. Covers environmental monitoring, food safety, medical diagnosis, etc. [0003] SAW sensors are mainly divided into four categories, active delay line type, active resonator type, passive delay line type and passive resonator type. Among them, the structure of the active delay line type SAW sensor is mainly composed of input and output interdigitated The transducer is deposited on the surface of the piezoelectric substrate, the input interdigital transducer is used to generate the excitation signal and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02
CPCG01N29/022
Inventor 永远许章亮贺正琦李盼召吴浪陈伯仲
Owner SOUTHWEST JIAOTONG UNIV
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