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A rotating metal target and its preparation method and device

A metal target and metal pipe technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve problems such as unfavorable preparation of high-purity aluminum targets, difficult process control, expensive processing equipment, etc. problem, to achieve the effect of cheap processing equipment, low cost, and grain size refinement

Active Publication Date: 2020-07-28
FUJIAN ACETRON NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Chinese patent CN109518140A provides a method for preparing aluminum targets by combining vacuum melting and casting, forging and rolling, and then heat treatment. This method has problems such as expensive processing equipment and difficult process control.
Chinese patent CN108165785A provides a method for grain refinement by adding a refiner, which will introduce impurities, which is not conducive to the preparation of high-purity aluminum targets

Method used

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  • A rotating metal target and its preparation method and device
  • A rotating metal target and its preparation method and device
  • A rotating metal target and its preparation method and device

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preparation example Construction

[0030] The invention provides a method for preparing a rotating metal target, comprising the following steps:

[0031] Under vacuum conditions, the metal tube is subjected to high-energy electron beam regional remelting treatment and then cooled to obtain a rotating metal target.

[0032] In the present invention, the metal pipes preferably include aluminum pipes, copper pipes or titanium pipes, the purity is preferably >99.999%, the outer diameter is preferably 150-180mm, more preferably 150-165mm, and the inner diameter is preferably 110-120mm, further It is preferably 120 mm, and the length is preferably 500 to 3000 mm, more preferably 850 to 2940 mm. In the present invention, the metal pipe is preferably cast by vacuum arc melting process. The present invention has no special limitation on the specific operation of the vacuum arc melting process, and the vacuum arc melting process well known to those skilled in the art can be used. The invention adopts the metal pipe mat...

Embodiment 1

[0060] High-purity aluminum ingots (>99.999%) are melted and cast into aluminum tubes by vacuum arc melting. The specifications of the aluminum tubes are outer diameter OD=150mm, inner diameter ID=120mm, length L=860mm;

[0061] Install the prepared aluminum tube on a movable rotary table, and connect it with a cooling water pipe, pass constant temperature cooling water inside the aluminum tube, set the cooling water temperature to 15°C, and the flow rate to 2m / s;

[0062] In a vacuum of 10 -2 In the vacuum chamber of Pa, high-energy electron beams are used to remelt the pipe area. Adjust the electron beam output power to 15kW, the accelerating voltage to 60kV, and the scanning current to 250mA. Form a small molten pool with a diameter of 4mm and a depth of about 12mm on the surface of the aluminum tube;

[0063] According to the thickness of the metal pipe T=15mm (T=(OD-ID) / 2), set the rotational speed of the aluminum pipe to 1.5m / min and the horizontal movement speed of th...

Embodiment 2

[0067] High-purity aluminum ingots (>99.999%) are melted and cast into aluminum tubes by vacuum arc melting. The specifications of the aluminum tubes are outer diameter OD=175mm, inner diameter ID=120mm, and length L=2950mm;

[0068] Install the prepared aluminum tube on a movable rotary table, and connect it with a cooling water pipe, pass constant temperature cooling water inside the aluminum tube, set the cooling water temperature to 15°C, and the flow rate to 2m / s;

[0069] In a vacuum of 10 -2 In the vacuum chamber of Pa, high-energy electron beams are used to remelt the pipe area. Adjust the electron beam output power to 25kW, the accelerating voltage to 71.4kV, and the scanning current to 350mA. Form a small molten pool with a diameter of 5mm and a depth of about 24mm on the surface of the aluminum tube;

[0070] According to the thickness T=27.5mm (T=(OD-ID) / 2) of the metal pipe, set the rotational speed of the aluminum pipe to 2.5m / min and the horizontal movement sp...

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Abstract

The invention provides a rotary metal target material and a preparation method and device thereof, and belongs to the field of target material preparation. The preparation method comprises the following steps: under the vacuum condition, carrying out regional remelting treatment on a metal pipe through a high-energy electron beam, and then cooling to obtain the rotary metal target material. According to the rotary metal target material and the preparation method and device thereof, the high-energy electron beam is used for carrying out regional remelting on the metal pipe, and meanwhile cooling treatment is combined, so that the rotary metal target material has high purity and no impurities existing in the target material, and the grain size of the rotary metal target material is refined; and the preparation method is simple in process, the process is easy to control, the cost of processing equipment is low.

Description

technical field [0001] The invention relates to the field of target preparation, in particular to a rotating metal target and its preparation method and device. Background technique [0002] Aluminum target is suitable for DC two-pole sputtering, three-pole sputtering, four-stage sputtering, radio frequency sputtering, facing target sputtering, ion beam sputtering, magnetron sputtering and other fields, and can be coated with reflective film, conductive film, semiconductor film, capacitor film, decorative film, protective film, integrated circuit, display, etc. Since the utilization rate of rotating targets is much higher than that of planar targets, the demand for rotating aluminum targets is increasing day by day. The requirements for aluminum targets are high purity, high density, and fine grain size. At present, the conventional preparation process of rotating aluminum targets is to use high-purity (purity > 99.999%) aluminum rods for extrusion deformation and proce...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C22B9/22
CPCC22B9/228C23C14/3414
Inventor 林志河陈钦忠陈锦烨汪家兵
Owner FUJIAN ACETRON NEW MATERIALS CO LTD
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