W-W2N strengthening and toughening nanometer multi-layer coating and preparation method thereof

A nano-multilayer and coating technology, applied in the coating, metal material coating process, ion implantation plating and other directions, can solve the problem of limited effect of strengthening and toughening, reduce residual stress, improve strength and toughness, The effect of a low coefficient of friction

Active Publication Date: 2019-11-12
XI'AN PETROLEUM UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a commonly used hard / hard system, ceramic-ceramic coatings have good hardness enhancement, and their toughness has also been strengthened to a certain extent. However, due to the influence of the properties of the material itself, the effect of this strengthening and toughening is limited.

Method used

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  • W-W2N strengthening and toughening nanometer multi-layer coating and preparation method thereof
  • W-W2N strengthening and toughening nanometer multi-layer coating and preparation method thereof
  • W-W2N strengthening and toughening nanometer multi-layer coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] see figure 1 , W-W in Example 1 2 N nanometer multilayer coating includes a soft layer W layer with dark stripes, and a hard layer W layer with light stripes 2 N layer, soft layer W layer and hard layer W 2 N layers are alternately formed on the surface of the base material. This kind of W-W with modulation period composed of soft layer and hard layer 2 N nanometer multilayer coating has a thickness of 1 μm, a hardness of 30 GPa, and a toughness of 5.6 MPa-m 1 / 2 , the internal stress can be controlled to -0.49GPa, the modulation period is 10nm, the W single layer in this modulation structure is 7nm, W 2 The N monolayer is 3nm, and a relatively obvious columnar crystal morphology can be seen, and the coating exhibits a good multilayer structure. And it can be observed that the W layer and the W 2 A sharp interface is formed between the N layer, the W layer and the W 2 A semi-coherent interface is formed between the N layers. This is due to the fact that the semi...

Embodiment 2

[0034] see figure 2 , W-W in Example 2 2 N nanometer multilayer coating includes a soft layer W layer with dark stripes, and a hard layer W layer with light stripes 2 N layer, soft layer W layer and hard layer W 2 N layers are alternately formed on the surface of the base material. This kind of W-W with modulation period composed of soft layer and hard layer 2 N nanometer multilayer coating has a thickness of 1μm, a hardness of 29.1GPa, and a toughness of 7.1MPa-m 1 / 2 , the internal stress can be controlled to -0.58GPa, the modulation period is 10nm, the W monolayer in this modulation structure is 8nm, and the W 2 The N monolayer is 2nm, and a relatively obvious columnar crystal morphology can be seen, and the coating exhibits a good multilayer structure. At the same time, it can be observed that the W layer and the W 2 A sharp interface is formed between the N layer, the W layer and the W 2 A semi-coherent interface is formed between the N layers. This is due to the ...

Embodiment 3

[0047] W-W 2 The N metal-ceramic nano multilayer coating includes a modulated structure periodically arranged on the surface of the base material, and the modulated structure is that soft phases and hard phases are periodically arranged alternately on the surface of the base material.

[0048] W-W 2 The thickness of the N nanometer multilayer coating is 1 μm.

[0049] The modulation period of the modulation structure is a fixed value of 10 nm.

[0050] The soft phase is a metal phase, and the thickness of a single layer of the metal phase is 6nm.

[0051] The hard phase is a ceramic phase, and the single layer thickness of the ceramic phase is 4nm.

[0052] W is used as the soft phase of the metal-ceramic nano multilayer coating, and the thickness of the single layer is 6nm.

[0053] W 2 N is used as the hard phase of the metal-ceramic nano multilayer coating, and the thickness of the single layer is 4nm.

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Abstract

A W-W2N metal-ceramic nanometer multi-layer coating comprises modulation structures periodically arranged on the surface of a substrate material; the modulation structures are composed of soft phasesand hard phases to be periodically and alternately arranged on the surface of the substrate material; a magnetron sputtering preparation method of the W-W2N nanometer multi-layer coating includes thefollowing steps that (1) the substrate material is provided, and organic matter adhering to the surface of a substrate is removed; (2) the substrate material is fast dried and contained into a vacuumchamber, bombardment is performed on the substrate material with Ar+ion beams, oxygen atoms on the surface of the substrate are removed, and vacuumizing continues; and (3) the vacuum chamber is filledwith argon and nitrogen mixed gas, and before deposition of the multi-layer coating, firstly deposition of a W2N transition layer is performed; and (4) the vacuum chamber is periodically filled withhigh-purity argon and the mixed gas, and metal phase W layers and ceramic phases W2N layers are correspondingly obtained; the modulation period and the modulation ratio in the multi-layer coating arecontrolled; the high strength and toughness W-W2N nanometer multi-layer coating is obtained, and the characteristics that the potential application value is high and the strengthening and toughening effect is good are achieved.

Description

technical field [0001] The invention belongs to the technical field of surface treatment, in particular to W-W 2 N metal-ceramic nano multilayer coating and preparation method thereof. Background technique [0002] Hard coatings play an important role in modern industry. Because of their high strength and durability, they are widely used in tool coatings, friction and wear parts, and high-temperature protective coatings. Especially in the field of tool coating, in order to meet the requirements of higher hardness and wear resistance for cutting tools in the development of advanced technologies such as high-speed cutting and dry cutting in modern manufacturing, people have designed nc -Me n N / a -Si 3 N 4 Superhard nanocomposite coating system, this kind of coating system composed of two hard phases is called hard / hard system. This superhard coating with a hardness of more than 40 GPa has shown outstanding advantages in applications where abrasive wear is the main cutti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/18C23C14/34C23C14/54
CPCC23C14/0036C23C14/022C23C14/024C23C14/0641C23C14/185C23C14/34C23C14/54
Inventor 王晨安敏荣江浩吕祥鸿
Owner XI'AN PETROLEUM UNIVERSITY
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