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A recovery device for cvi/cvd process tail gas

A technology for recovering device and process tail gas, applied in hydrogen/syngas production, nano-carbon, fibrous fillers, etc., can solve the problem of low utilization rate of source gas, achieve easy control of reaction temperature, prolong residence time, and stabilize reaction environment Effect

Active Publication Date: 2022-04-08
上海康碳复合材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the utilization rate of source gas in the preparation process of carbon / carbon materials is low, only about 10%.

Method used

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  • A recovery device for cvi/cvd process tail gas
  • A recovery device for cvi/cvd process tail gas
  • A recovery device for cvi/cvd process tail gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Such as Figure 1~3 Shown is an embodiment of the present invention,

[0031] (1) Equipment:

[0032] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isothe...

Embodiment 2

[0041] Such as Figure 4~6 Shown is an embodiment of the present invention,

[0042] (1) Equipment:

[0043] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isothe...

Embodiment 3

[0052] Such as Figure 7-9 Shown is an embodiment of the present invention,

[0053] (1) Equipment:

[0054] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isothe...

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Abstract

The invention discloses a recovery device for CVI / CVD process tail gas, which comprises cooling filter equipment, a vacuum pump, an isothermal cracking furnace and later comprehensive treatment equipment. The cooling filter equipment includes a circulating liquid cooling module, an oil filter and a dry filter; isothermal cracking A preheating zone module is placed at the bottom of the furnace, and an isothermal zone module is set above the preheating zone module. The preheating zone module is a multi-layer labyrinth graphite plate. The lower part of the isothermal zone module is the delay buffer zone, and the upper part of the isothermal zone module is the upper cavity of the isothermal zone. The upper cavity of the isothermal zone is equipped with a multi-layer graphite plate structure. The graphite plate is equipped with an activated carbon growth structure, and the surface of the activated carbon growth structure is loaded with carbon black catalyst. . The top of the isothermal cracking furnace is a gas outlet, and the gas outlet is connected to the later comprehensive processing equipment through pipelines. The post-comprehensive treatment equipment includes a pressure change separator and a solid filter. The invention is a recovery device and method of CVI / CVD process tail gas with high treatment efficiency, good safety performance and high eco-environmental friendliness.

Description

technical field [0001] The invention relates to an industrial tail gas treatment device and method, in particular to a recovery device for CVI / CVD process tail gas. Background technique [0002] People pay more and more attention to environmental protection, and the voice of advocating green energy is also getting higher and higher. How to recycle waste gas in industrial production and turn waste into treasure has become a vital part of the entire industrial system. The field of environmental protection is becoming more and more important. received more and more attention. The invention mainly aims at the market demand of carbon / carbon composite materials, and focuses on the efficient utilization of alkane tail gas in the production process of carbon / carbon composite materials. Carbon / carbon composite materials have excellent properties such as high temperature resistance, high specific strength, and high specific modulus, and are widely used in photovoltaic monocrystalline...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/16C01B32/15C01B3/26C09C1/48
CPCC01B32/16C01B32/15C01B3/26C09C1/48C01B2203/0277C01B2203/04C01B2203/066C01B2203/1058C01B2203/1047C01B2203/1241C01B2203/1258
Inventor 邵忠贾林涛吴彪李爱军
Owner 上海康碳复合材料科技有限公司
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