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Preparation method of light-absorption layer of thin-film solar cell

A technology for solar cells and light-absorbing layers, applied in the field of solar cells, can solve problems such as increased band gap, low repeatability, and difficulty in ensuring the quality of light-absorbing layers, so as to avoid excessive and inhomogeneous, good V-shaped gradient Distribution, the effect of improving the photoelectric conversion rate

Active Publication Date: 2019-12-13
SHENZHEN INST OF ADVANCED TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this high-temperature selenization vulcanization process, although the vulcanization can be effectively carried out and the bandgap width can be increased, the selenization and vulcanization processes cannot be precisely controlled separately. The degree of selenization and sulfuration in the film area is different, resulting in poor film uniformity and low repeatability, and it is difficult to guarantee the quality of the light-absorbing layer in industrial production
At the same time, although this one-step process of selenization and sulfide is simple and time-saving, the activity of sulfur is high at high temperature, and the simultaneous sulfidation and selenization will cause a large amount of sulfur to enter the copper indium gallium selenide absorbing layer. Internally, the internal bandgap width is increased, so the bandgap width of the entire light-absorbing layer cannot reach the recognized best V-shaped distribution, which will reduce the photoelectric conversion rate of the thin-film battery

Method used

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  • Preparation method of light-absorption layer of thin-film solar cell
  • Preparation method of light-absorption layer of thin-film solar cell
  • Preparation method of light-absorption layer of thin-film solar cell

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preparation example Construction

[0033] The invention provides a method for preparing a light-absorbing layer of a thin-film solar cell, such as figure 2 Shown, described preparation method comprises steps:

[0034] S10, preparing and obtaining a prefabricated copper indium gallium layer by using a magnetron sputtering process.

[0035] Specifically, in a vacuum environment, the alloy elements constituting the copper indium gallium prefabricated layer are sputtered onto the deposition substrate (such as the back electrode of a solar cell) by magnetron sputtering to obtain an alloy film to form a copper indium gallium prefabricated layer . Preferably, in the copper indium gallium prefabricated layer, the molar ratio of the sum of copper to indium gallium is 0.9˜0.95, and the molar ratio of the sum of gallium to indium gallium is 0.2˜0.3.

[0036] S20. Evaporating and depositing a selenium thin film layer on the copper indium gallium prefabricated layer, the molar ratio of the sum of selenium in the selenium...

Embodiment 1

[0053] 1. Prepare the back electrode: molybdenum with a thickness of 1000 nm is evaporated on the soda-lime glass substrate as the back electrode.

[0054] 2. Preparation of copper indium gallium prefabricated layer: use a copper gallium target with a gallium content of 20% to 30%, sputter deposit a 200nm thick copper gallium film on the molybdenum back electrode, and then use an indium target to continue on the sample A thin film of indium with a thickness of 500 nm was deposited by sputtering.

[0055] 3. A solid selenium thin film layer with a thickness of 700nm is vapor-deposited on the copper indium gallium prefabricated layer, and the molar ratio of the sum of selenium in the selenium thin film layer to the sum of copper gallium in the copper indium gallium prefabricated layer is 1.6.

[0056] 4. Put the selenium-plated copper indium gallium prefabricated layer into a sealable annealing furnace, and first perform gas washing in the furnace: vacuuming, flushing with nitro...

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Abstract

The invention discloses a preparation method of a light-absorption layer of a thin-film solar cell. The method comprises the following steps of preparing a copper-indium-gallium prefabricated layer; preparing a selenium thin-film layer on the copper-indium-gallium prefabricated layer, wherein the molar ratio of selenium to the sum of copper and gallium is greater than 1; placing the copper-indium-gallium prefabricated layer in an annealing furnace, heating the copper-indium-gallium prefabricated layer to a first preset temperature, and keeping the first preset temperature for a first preset time period; heating the copper-indium-gallium prefabricated layer from the first preset temperature to a second preset temperature, keeping the second preset temperature for a second preset time periodto conduct selenization on the prefabricated layer, and then extracting selenium steam from the annealing furnace; heating the copper-indium-gallium prefabricated layer from the second preset temperature to a third preset temperature, then keeping the third preset temperature for a third preset time period, and introducing hydrogen sulfide gas within the third preset time period to vulcanize theprefabricated layer, so as to prepare the copper-indium-gallium selenide sulfide light-absorption layer. According to the method, the selenization and vulcanization of the copper-indium-gallium prefabricated layer are carried out step by step at different temperatures, so that excessive selenization and nonuniformity are avoided, the vulcanization quality is ensured, and the quality of the light-absorption layer is improved.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a method for preparing a light-absorbing layer of a thin-film solar cell. Background technique [0002] Copper indium gallium selenide (CIGS) thin-film solar cell is a kind of high-efficiency thin-film solar cell, which has the advantages of high stability, low cost and long life. Copper indium gallium selenide thin film solar cell is essentially a direct bandgap semiconductor, and its basic structure includes a substrate, a back electrode, a light absorption layer, a buffer layer, a window layer, an antireflection layer and a metal electrode layer that are stacked in sequence. The photoelectric absorption layer is a compound semiconductor film composed of four elements: copper, indium, gallium and selenium. At present, there are mainly co-evaporation and sputtering selenization methods for preparing copper indium gallium selenide light absorbing layer. The sputt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/16C23C14/24C23C14/58H01L31/032H01L31/0749H01L31/18
CPCC23C14/06C23C14/165C23C14/24C23C14/35C23C14/5806H01L31/0322H01L31/0749H01L31/18Y02E10/541Y02P70/50
Inventor 高传增王顺李文杰李伟民罗海林冯叶陈明钟国华杨春雷
Owner SHENZHEN INST OF ADVANCED TECH