Preparation method of light-absorption layer of thin-film solar cell
A technology for solar cells and light-absorbing layers, applied in the field of solar cells, can solve problems such as increased band gap, low repeatability, and difficulty in ensuring the quality of light-absorbing layers, so as to avoid excessive and inhomogeneous, good V-shaped gradient Distribution, the effect of improving the photoelectric conversion rate
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[0033] The invention provides a method for preparing a light-absorbing layer of a thin-film solar cell, such as figure 2 Shown, described preparation method comprises steps:
[0034] S10, preparing and obtaining a prefabricated copper indium gallium layer by using a magnetron sputtering process.
[0035] Specifically, in a vacuum environment, the alloy elements constituting the copper indium gallium prefabricated layer are sputtered onto the deposition substrate (such as the back electrode of a solar cell) by magnetron sputtering to obtain an alloy film to form a copper indium gallium prefabricated layer . Preferably, in the copper indium gallium prefabricated layer, the molar ratio of the sum of copper to indium gallium is 0.9˜0.95, and the molar ratio of the sum of gallium to indium gallium is 0.2˜0.3.
[0036] S20. Evaporating and depositing a selenium thin film layer on the copper indium gallium prefabricated layer, the molar ratio of the sum of selenium in the selenium...
Embodiment 1
[0053] 1. Prepare the back electrode: molybdenum with a thickness of 1000 nm is evaporated on the soda-lime glass substrate as the back electrode.
[0054] 2. Preparation of copper indium gallium prefabricated layer: use a copper gallium target with a gallium content of 20% to 30%, sputter deposit a 200nm thick copper gallium film on the molybdenum back electrode, and then use an indium target to continue on the sample A thin film of indium with a thickness of 500 nm was deposited by sputtering.
[0055] 3. A solid selenium thin film layer with a thickness of 700nm is vapor-deposited on the copper indium gallium prefabricated layer, and the molar ratio of the sum of selenium in the selenium thin film layer to the sum of copper gallium in the copper indium gallium prefabricated layer is 1.6.
[0056] 4. Put the selenium-plated copper indium gallium prefabricated layer into a sealable annealing furnace, and first perform gas washing in the furnace: vacuuming, flushing with nitro...
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