Double-electric-layer capacitive flexible pressure sensor with enhanced inclined structure and manufacturing method

Abstract

The invention discloses a double-electric-layer capacitive flexible pressure sensor with an enhanced inclined structure and a manufacturing method. The sensor comprises an inclined microstructure electrode and an electrolyte layer formed by combining a polymer with an ionic liquid. The manufacturing method comprises that an inclined groove imprinting mold is prepared, the inclined microstructure electrode is prepared by a nano imprinting and sputtering deposition method, a working counter electrode and the solid electrolyte are prepared, and the inclined microstructure electrode, the working counter electrode and the solid electrolyte are assembled; and after that the sensor is connected to a capacitance test system, ions in electrolyte layer and electrons in an external circuit are gathered in the contact interface between the inclined microstructure electrode and the electrolyte layer under the voltage effect to form a tested double-electric-layer capacitor, the capacitance is proportional to the area of the interface between the electrolyte layer and the inclined microstructure electrode, the contact area is increased after that the sensor bears a force, and further the capacitance is increased. The sensor has a wide measurement range, and is extremely sensitive within a large pressure range.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to an electric double layer capacitive flexible pressure sensor enhanced by an inclined structure and a manufacturing method thereof. Background technique [0002] In recent years, the development of wearable devices, electronic skins, and intelligent robots has put forward new requirements for sensors such as flexibility, miniaturization, and integration. As the sensor itself, it needs to have good sensing performance such as high sensitivity, good static and dynamic response, long service life, high resolution and large measurement range. According to different sensing mechanisms, flexible sensors can be mainly divided into three types: piezoelectric, resistive and capacitive. Among them, piezoelectric sensors can only detect the response of dynamic force but cannot detect static force, resistive sensors generally have low sensitivity and serious hysteresis, while cap...

AI Technical Summary

Problems solved by technology

This structured method has ideal sensitivity in the low pressure range, but when the pressure increases to a certain value, the relative area changes slowly, and the device sensitivity drops rapidly and shows obvious nonlinearity.

At the same time, the mechanical properties of structured electrolyte layers are generally poor, causing irreversible deformation during long-term use, resulting in changes in device performance.

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