A wide-temperature, high-precision optical acceleration sensing
chip and acceleration sensor based on the principle of a microcavity interferometer are disclosed. The acceleration sensing
chip includes a first substrate, a second substrate, and a third substrate. An
optical fiber mounting base and a light-transmitting hole are formed on the first substrate. The
chip is characterized by a single-mode
optical fiber assembly fixed on the
optical fiber mounting base. The end face of the single-mode optical
fiber assembly is precision ground and perpendicular to the axis of the optical
fiber core. The optical
fiber mounting base is a stepped hole with a first stepped portion and a second stepped portion. The single-mode optical fiber
assembly includes a glass sleeve disposed on the outer layer and a single-mode optical fiber disposed in the core. The first stepped portion, the second stepped portion, the end face of the glass sleeve, and the end face of the single-mode optical fiber are all perpendicular to the core axis of the single-mode optical fiber. The first stepped portion forms a first fit with the end face of the glass sleeve, and the second stepped portion forms a second fit with the end face of the single-mode optical fiber.