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A wide-temperature high-precision optical acceleration sensing chip and an acceleration sensor based on microcavity interferometer principle

A wide-temperature, high-precision optical acceleration sensing chip and acceleration sensor based on the principle of a microcavity interferometer are disclosed. The acceleration sensing chip includes a first substrate, a second substrate, and a third substrate. An optical fiber mounting base and a light-transmitting hole are formed on the first substrate. The chip is characterized by a single-mode optical fiber assembly fixed on the optical fiber mounting base. The end face of the single-mode optical fiber assembly is precision ground and perpendicular to the axis of the optical fiber core. The optical fiber mounting base is a stepped hole with a first stepped portion and a second stepped portion. The single-mode optical fiber assembly includes a glass sleeve disposed on the outer layer and a single-mode optical fiber disposed in the core. The first stepped portion, the second stepped portion, the end face of the glass sleeve, and the end face of the single-mode optical fiber are all perpendicular to the core axis of the single-mode optical fiber. The first stepped portion forms a first fit with the end face of the glass sleeve, and the second stepped portion forms a second fit with the end face of the single-mode optical fiber.
Owner:SHANGHAI BAIANTEK SENSING TECH CO LTD +1