Preparation method of biomolecule terahertz sensor chip of universal nano-scale fluid and application thereof
A biomolecule and sensor chip technology, applied in the field of biosensors, can solve the problems of high absorption liquid sensing difficulty and low detection sensitivity, and achieve the effect of improving detection sensitivity and increasing detection efficiency
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[0026] The following is combined with the specific implementation Figure 1-6 To elaborate further:
[0027] A method for preparing a biomolecular terahertz sensor chip for general-purpose nanoscale fluids, comprising the following steps:
[0028] (1) Fabrication of SRRs metamaterials
[0029] a. Substrate substrate cleaning: Put the cut silicon wafer into an ultrasonic cleaner for cleaning. After taking it out, first clean it with absolute ethanol and then rinse it with deionized water, then dry the surface of the silicon wafer with high-pressure nitrogen, and then Put into drying box; b. Coating: plate the gold film that thickness is 120nm on the channel surface; C. Coating: photoresist (SU-8) is evenly spin-coated on the surface of gold film, put into drying box to dry Dry, cool naturally in a dark room; d. Exposure: Use an exposure machine to perform periodic structural unit exposure on a uniformly coated surface (for the structure see figure 1 ); the unit structure is ...
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