A Surface Acoustic Wave Microfluidic Device for Particle Separation

Abstract

The invention discloses an acoustic surface wave micro-fluidic device for particle separation. The micro-fluidic device comprises a piezoelectric substrate, a single interdigital energy transducer, adiaphragm, and a PDMS micro channel. The interdigital energy transducer is formed on the piezoelectric substrate through vacuum evaporation, SiO2 is sputtered on the piezoelectric substrate other thanthe electrode to form the diaphragm; and through an oxygen plasma surface treatment, the PDMS micro channel and the piezoelectric substrate containing an interdigital structure are bonded in an irreversible mode. Through the single interdigital energy transducer, acoustic surface waves are generated, wherein two ends of the single interdigital energy transducer have reflecting gratings with different lengths. Under the action of the acoustic surface waves, particles with different diameters are separated in the micro channel because the moving directions of the particles are different. The particles are separated by only using the interdigital energy transducer, the structural integrity is higher, the occupied area of a micro-fluidic chip becomes smaller, at the same time, the processingcost is low, the energy consumption is reduced, the manufacturing is simple, and the device is portable.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and relates to a microfluidic chip structure that uses surface acoustic waves to separate particles. Background technique [0002] Microfluidics is a technology for processing or manipulating liquids at the micron or nanoscale level, which has the advantages of high throughput and high sensitivity. The surface acoustic wave can be generated by the interdigital transducer on the microfluidic device, and then the particles in the fluid are subjected to the acoustic radiation force to move accordingly. Therefore, microfluidic technology is suitable for the efficient separation of particles, and the separation process has the characteristics of non-contact and pollution-free. [0003] At present, there are two main methods for particle separation using microfluidics: one is to use the standing waves generated by a pair of interdigital transducers to arrange the chaotic particles in ...

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Problems solved by technology

Because these two methods use multiple interdigital transducers and complex flow channels (the alignment requirements between interdigital transducers and microchannels are high), they have disadvantages such as large occupied area, high cost, and cumbersome design process. , and it is not convenient to make and carry

[0004] Chinese patent CN104726331A discloses a microfluidic plasma separation chip and method based on surface acoustic waves, which combines interdigital transducers and microchannel structure design to realize the separation of blood cells and plasma in microchannels. Separated, only a set of interdigital transducers are arranged along one side of the microchannel, but like other existing surface acoustic wave-based microfluidic particle chips, the microchannels and interdigital transducers are laid along the horizontal direction On the chip substrate, it is difficult to effectively reduce the area occupied by structures such as microchannels and interdigital transducers on the substrate

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